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1. WO1991000522 - DEVICE FOR MEASURING MECHANICAL FORCES AND DYNAMIC EFFECTS

Publication Number WO/1991/000522
Publication Date 10.01.1991
International Application No. PCT/DE1990/000412
International Filing Date 31.05.1990
Chapter 2 Demand Filed 22.01.1991
IPC
G01P 15/08 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
G01P 15/12 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
12by alteration of electrical resistance
G01P 15/125 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
125by capacitive pick-up
CPC
G01P 15/0802
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0802Details
G01P 15/12
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
12by alteration of electrical resistance
G01P 15/123
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
12by alteration of electrical resistance
123by piezo-resistive elements, e.g. semiconductor strain gauges
G01P 15/125
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
125by capacitive pick-up
G01P 2015/0828
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0805being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
0822for defining out-of-plane movement of the mass
0825for one single degree of freedom of movement of the mass
0828the mass being of the paddle type being suspended at one of its longitudinal ends
Applicants
  • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. [DE/DE]; Leonrodstraße 54 D-80636 München, DE (AllExceptUS)
  • WAGNER, Bernhard [DE/DE]; DE (UsOnly)
  • BENECKE, Wolfgang [DE/DE]; DE (UsOnly)
  • RIETHMÜLLER, Werner [DE/DE]; DE (UsOnly)
  • SCHNAKENBERG, Uwe [DE/DE]; DE (UsOnly)
Inventors
  • WAGNER, Bernhard; DE
  • BENECKE, Wolfgang; DE
  • RIETHMÜLLER, Werner; DE
  • SCHNAKENBERG, Uwe; DE
Agents
  • PATENTSTELLE FÜR DIE DEUTSCHE FORSCHUNG; Leonrodstraße 68 D-8000 München 19, DE
Priority Data
P 39 20 645.923.06.1989DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) VORRICHTUNG ZUR MESSUNG MECHANISCHER KRÄFTE UND KRAFTWIRKUNGEN
(EN) DEVICE FOR MEASURING MECHANICAL FORCES AND DYNAMIC EFFECTS
(FR) DISPOSITIF POUR MESURER DES FORCES MECANIQUES ET DES EFFETS DYNAMIQUES
Abstract
(DE)
Beschrieben wird eine Vorrichtung zur Messung mechanischer Kräfte und Kraftwirkungen, die mittels mikromechanischer Prozesse herstellbar ist. Unter dem Einfluss einer mechanischen Kraft wird eine bewegliche Masse (4) gegen den Widerstand eines Rückstellelementes (3) ausgelenkt. Für viele Anwendungen müssen solche Vorrichtungen unempfindlich gegen mechanische Überbeanspruchung sein. Bei bekannten Lösungen wird der Überlastschutz durch mechanische Anschläge erreicht, die den Ausschlag der Masse begrenzen. Bei monolithisch integrierten Vorrichtungen bedeutet dies, dass ein zusätzliches Element an der Vorrichtung angebracht werden muss. Die erfindungsgemässe Vorrichtung weist Elemente zur mechanischen Begrenzung von Ausschlägen der Masse auf, die gemeinsam mit den übrigen Elementen der Vorrichtung monolithisch integriert werden können. Die Elemente sind als ineinanderfassende Zungen (5, 6, 8, 9) ausgebildet, die bewegungsbegrenzende Brückenstrukturen (7, 10) aufweisen.
(EN)
A device for measuring mechanical forces and dynamic effects can be manufactured by micromechanical processes. A movable mass (4) is deflected, by the action of a mechanical force, against the resistance of a restoring element (3). For many applications, such devices must be insensitive to excessive mechanical stress. In known solutions, overload protection is achieved by means of mechanical limit stops which restrict the deflection of the mass. The device of the invention has elements which mechanically limit deflections of the mass and which can be intregrated monolithically with the other elements of the device, rather than being an additional element. The elements are designed as interlocking tongues (5, 6, 8, 9) which have motion-limiting bridge structures (7, 10).
(FR)
Ce dispositif pour mesurer des forces mécaniques et des effets dynamiques peut être fabriqué par des procédés micromécaniques. Une force mécanique fait dévier une masse mobile (4) contre la résistance d'un élément de rappel (3). Les dispositifs de ce genre sont souvent appelés à supporter des efforts mécaniques excessifs. Dans les solutions de l'art antérieur, ce sont des butées mécaniques limitant la déviation de la masse qui assurent la protection contre ces efforts excessifs. Le dispositif selon la présente invention, quant à lui, comporte des éléments pour la limitation mécanique des déviations de la masse, qui s'intégrent monolithiquement avec les autres parties du dispositif. Ces éléments consistent en des languettes (5, 6, 8, 9) qui s'emboîtent les unes dans les autres et qui sont reliées par des pontages (7, 10) servant à limiter le mouvement.
Also published as
Latest bibliographic data on file with the International Bureau