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1. WO1991000513 - METHOD OF OBTAINING ACCURATE COMPOSITIONAL INFORMATION OF MULTILAYER COMPOSITIONS

Publication Number WO/1991/000513
Publication Date 10.01.1991
International Application No. PCT/US1990/003462
International Filing Date 22.06.1990
Chapter 2 Demand Filed 09.01.1991
IPC
G01N 21/35 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
G01N 23/08 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
02by transmitting the radiation through the material
06and measuring the absorption
08using electric detection means
CPC
G01N 2021/3595
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3595using FTIR
G01N 23/06
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
02by transmitting the radiation through the material
06and measuring the absorption
Applicants
  • MEASUREX CORPORATION [US/US]; One Results Way Cupertino, CA 95014, US
Inventors
  • VIDRINE, Warren, D.; US
Agents
  • KREBS, Robert, E.; Burns, Doane, Swecker & Mathis George Mason Building Washington & Prince Streets P.O. Box 1404 Alexandria, VA 22313-1404, US
Priority Data
370,42022.06.1989US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD OF OBTAINING ACCURATE COMPOSITIONAL INFORMATION OF MULTILAYER COMPOSITIONS
(FR) PROCEDE PERMETTANT D'OBTENIR DES INFORMATIONS PRECISES SUR LA COMPOSITION DE COMPOSES MULTICOUCHES
Abstract
(EN)
The present invention relates to a method, or process, for deriving compositional information from a multi-layer composition which includes the steps of obtaining multi-layer fractional composition information using a non-contact gauge such as an FTIR gauge (8); obtaining additional multi-layer composition information using a beta gauge (10); and, correcting for beta ray absorption differences among the layers of the muylti-layer composition by combining the multi-layer fractional composition information with the additional multi-layer composition information obtained using the beta gauge (10).
(FR)
L'invention concerne un procédé permettant de dériver des informations sur la composition d'un composé multicouche, comprenant les étapes consistant à obtenir des informations de composition fractionnelle multicouche à l'aide d'une jauge sans contact telle qu'une jauge FTIR (8); à obtenir des informations supplémentaires de composition multicouche à l'aide d'une jauge bêta (10); et, à corriger les différences d'absorption des rayons bêta parmi les couches de la composition multicouche, par combinaison des informations de la composition fractionnelle multicouche avec les informations supplémentaires de la composition multicouche obtenues à l'aide de ladite jauge bêta (10).
Also published as
FI916001
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