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Machine translation
1. (WO1989004386) IMPROVED ZONE MELT RECRYSTALLIZATION APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1989/004386    International Application No.:    PCT/US1988/004043
Publication Date: 18.05.1989 International Filing Date: 10.11.1988
Chapter 2 Demand Filed:    04.09.1989    
IPC:
C30B 13/00 (2006.01), C30B 13/24 (2006.01), C30B 13/32 (2006.01), C30B 31/12 (2006.01), H01L 21/00 (2006.01)
Applicants: KOPIN CORPORATION [US/US]; 695 Myles Standish Boulevard, Taunton, MA 02780 (US) (For All Designated States Except US).
ZAVRACKY, Paul, M. [US/US]; (US) (For US Only).
O'CONNOR, Kevin, J. [US/US]; (US) (For US Only)
Inventors: ZAVRACKY, Paul, M.; (US).
O'CONNOR, Kevin, J.; (US)
Agent: BROOK, David, E. @; Hamilton, Brook, Smith & Reynolds, Two Militia Drive, Lexington, MA 02173 (US)
Priority Data:
120,015 13.11.1987 US
Title (EN) IMPROVED ZONE MELT RECRYSTALLIZATION APPARATUS
(FR) APPAREIL AMELIORE DE RECRISTALLISATION PAR FUSION DE ZONE
Abstract: front page image
(EN)The improved zone-melt recrystallization apparatus is comprised of a port system for providing a thermal barrier between the recrystallization chamber and the loader assembly. A bellows system is used to lift a plurality of pins that support a silicon wafer being recrystallized. Flexure supports are designed to constrain the motion of the pins within the desired direction of motion of the wafer.
(FR)L'appareil de recristallisation par fusion de zone amélioré se compose d'un système de porte destiné à former une barrière thermique entre la chambre de recristallisation et l'ensemble de chargeur. On utilise un système à soufflet pour lever une pluralité de broches supportant une tranche de silicium recristallisée. Des supports de flexion sont conçus pour limiter le mouvement des broches dans le sens de déplacement désiré de la tranche.
Designated States: AU, JP, KR, SU.
European Patent Office (AT, BE, CH, DE, FR, GB, IT, LU, NL, SE).
Publication Language: English (EN)
Filing Language: English (EN)