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1. (WO1989000294) ACCELEROMETER
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1989/000294 International Application No.: PCT/EP1988/000619
Publication Date: 12.01.1989 International Filing Date: 08.07.1988
IPC:
G01P 15/08 (2006.01) ,G01P 15/09 (2006.01)
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
09
by piezo-electric pick-up
Applicants:
JENSEN, Borge, R. [DK/BE]; BE
Inventors:
JENSEN, Borge, R.; BE
Agent:
CRAWFORD, Andrew, B.; A.A. Thornton & Co. Northumberland House 303-306 High Holborn London WC1V 7LE, GB
Priority Data:
871609308.07.1987GB
Title (EN) ACCELEROMETER
(FR) ACCELEROMETRE
Abstract:
(EN) An accelerometer comprises a silicon beam (1) which is supported at one end and which has a layer of piezoelectric material (2) bonded thereto. A plurality of beams are manufactured simultaneously by dicing a silicon wafer to which the piezoelectric material has been bonded. The surface of the wafer opposite the bonded layer is etched so that the beams thus formed have a support body portion (3) to facilitate mounting.
(FR) Accéléromètre comprenant une poutre (1) en silicium supportée à une extrémité, à laquelle est liée une couche de matière piézo-électrique (2). On fabrique simultanément une pluralité de poutres, par découpage en cubes d'une tranche de silicium à laquelle a été liée la matière piézo-électrique. On décape la surface de la tranche opposée à la couche liée, de manière à ce que les poutres ainsi réalisées comportent une partie (3) de corps de support facilitant le montage.
Designated States: JP, US
European Patent Office (AT, BE, CH, DE, FR, GB, IT, LU, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)