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1. (WO1989000148) PROCESS FOR METAL NITRIDE DEPOSITION
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1989/000148 International Application No.: PCT/US1988/002259
Publication Date: 12.01.1989 International Filing Date: 05.07.1988
Chapter 2 Demand Filed: 20.02.1989
IPC:
C03C 17/22 (2006.01) ,C23C 16/30 (2006.01)
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
17
Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating
22
with other inorganic material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
22
characterised by the deposition of inorganic material, other than metallic material
30
Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
Applicants:
REGENTS OF THE UNIVERSITY OF MINNESOTA [US/US]; Morrill Hall 100 Church Street S.E. Minneapolis, MN 55455, US
Inventors:
GLADFELTER, Wayne, L.; US
MANTELL, Daniel, R.; US
EVANS, John, F.; US
SCHULZE, Roland, K.; US
Agent:
HAMRE, Curtis, B.; Merchant, Gould, Smith, Edell, Welter & Schmidt 1600 Midwest Plaza Building Minneapolis, MN 55402, US
HAMRE, Curtis, B.; Merchant, Gould, Smith, Edell, Welter & Schmidt 3100 Norwest Center 90 South Seventh Street Minneapolis, MN 55402, US
Priority Data:
069,71406.07.1987US
Title (EN) PROCESS FOR METAL NITRIDE DEPOSITION
(FR) PROCEDE PERMETTANT LE DEPOT DE NITRURES METALLIQUES
Abstract:
(EN) A method for forming metal nitride films is provided comprising employing the techniques of chemical vapor deposition to thermally decompose a vapor (8) comprising a dialkyl(Group III metal) azide, so as to deposit a film (9) of the corresponding metal nitride on the surface of a substrate (6).
(FR) Procédé permettant de réaliser des couches minces de nitrures métalliques, consistant à employer les techniques de dépôt en phase gazeuse par procédé chimique afin de décomposer thermiquement une vapeur (8) comprenant une azoture de dialkyle (métal du groupe III), de manière à déposer une couche mince (9) de la nitrure métallique correspondante sur la surface d'un substrat (6).
Designated States: DK, FI, JP, KR, NO
European Patent Office (AT, BE, CH, DE, FR, GB, IT, LU, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)