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1. WO1988008522 - DETECTOR FOR FORCE, ACCELERATION AND MAGNETISM USING RESISTOR ELEMENT

Publication Number WO/1988/008522
Publication Date 03.11.1988
International Application No. PCT/JP1988/000395
International Filing Date 22.04.1988
IPC
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1
Measuring force or stress, in general
18
using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
5
Apparatus for, or methods of, measuring force, e.g. due to impact, work, mechanical power, or torque, adapted for special purposes
16
for measuring several components of force
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
12
by alteration of electrical resistance
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
18
in two or more dimensions
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
20
Modifications of basic electric elements for use in electric measuring instruments; Structural combinations of such elements with such instruments
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
33
Arrangements or instruments for measuring magnetic variables
02
Measuring direction or magnitude of magnetic fields or magnetic flux
038
using permanent magnets, e.g. balances, torsion devices
G01L 1/18 (2006.01)
G01L 5/16 (2006.01)
G01P 15/08 (2006.01)
G01P 15/12 (2006.01)
G01P 15/18 (2013.01)
G01R 1/20 (2006.01)
CPC
G01L 1/18
G01L 5/162
G01P 15/0802
G01P 15/123
G01P 15/18
G01P 2015/084
Applicants
  • KABUSHIKI KAISHA NEXY KENKYUSHO [JP/JP]; 23-5, Tokiwa 3-chome Urawa-shi Saitama 336, JP (AllExceptUS)
  • OKADA, Kazuhiro [JP/JP]; JP (UsOnly)
Inventors
  • OKADA, Kazuhiro; JP
Agents
  • SATO, Kazuo @; Kyowa Patent & Law Office Room 323 Fuji Building 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100, JP
Priority Data
62/10126724.04.1987JP
62/10126924.04.1987JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) DETECTOR FOR FORCE, ACCELERATION AND MAGNETISM USING RESISTOR ELEMENT
(FR) DETECTEUR DE FORCES, D'ACCELERATION ET DE MAGNETISME, UTILISANT DES RESISTANCES
Abstract
(EN)
A force detector comprising piezoelectric resistor elements (R) formed on a single-crystal substrate (10), said resistor element changing its resistance in accordance with the deformation thereof; and a strain generator (20) including a support (21) and an actuator (23) to cause a mechanical deformation of the resistor elements in accordance with a displacement of the actuator with respect to the support. The force detector is designed to detect a force on the actuator in the form of changes in the resistance of resistor elements. The single-crystal substrate surface, where resistor elements are formed, is such that the piezoelectric resistance coefficient is maximum in two orthogonal directions. If a plummet (30) is attached to the actuator, the acceleration against the plummet can be determined. With a magnetic member (330) attached to the actuator, it is possible to determine the magnetic force acting on this magnetic member. If a magnetic force detecting system and an acceleration detecting system are combined for a compensating operation, a net magnetic force can be determined without the influence of an acceleration. In either case, the magnitude of a measurement can be determined along each axis of a three-dimensional coordinate system by properly arranging the resistor elements.
(FR)
Détecteur de forces comprenant des résistances (R) piézoélectriques disposées sur un substrat (10) à cristal unique, la résistance desdites résistances changeant avec leur déformation. Le détecteur comprend aussi un générateur de contraintes (20) composé d'un support (21) et d'un actuateur (23) qui provoque une déformation mécanique des résistances correspondant au déplacement de l'actuateur par rapport au support. Le détecteur de forces est conçu de manière à détecter une force agissant sur un actuateur en fonction des modifications qu'elle apporte à la résistance des résistances. La surface du substrat à cristal unique, sur laquelle les résistances sont disposées, est telle que le coefficient de résistance piézoélectrique est maximum dans deux directions orthogonales. Si l'on attache un plomb (30) à l'actuateur, l'accélération s'exerçant au niveau du plomb peut être déterminée. Lorsqu'on fixe un élément magnétique (300) sur l'actuateur, on peut déterminer la force magnétique agissant sur cet élément. Si un système de détection de la force magnétique et un système de détection de l'accélération sont combinés pour exercer une compensation, une force magnétique nette peut être déterminée sans l'influence d'une accélération. Dans un cas comme dans l'autre, la valeur à mesurer peut être déterminée sur chaque axe d'un système de coordonnées à trois dimensions en disposant adéquatement les résistances.
Also published as
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