WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO1988007262) PROCESS AND DEVICE FOR THE SURFACE TREATMENT OF SEMICONDUCTORS BY PARTICLE BOMBARDMENT
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1988/007262    International Application No.:    PCT/DE1988/000157
Publication Date: 22.09.1988 International Filing Date: 16.03.1988
Chapter 2 Demand Filed:    14.11.1988    
IPC:
H01J 37/32 (2006.01), H01L 21/223 (2006.01), H01L 21/263 (2006.01), H05H 1/46 (2006.01)
Applicants: OECHSNER, Hans [DE/DE]; (DE)
Inventors: OECHSNER, Hans; (DE)
Agent: VIEL, Georg; Am Zimmerplatz 16, D-6606 Saarbrücken-Gersweiler (DE)
Priority Data:
P 37 08 717.7 18.03.1987 DE
Title (EN) PROCESS AND DEVICE FOR THE SURFACE TREATMENT OF SEMICONDUCTORS BY PARTICLE BOMBARDMENT
(FR) PROCEDE ET DISPOSITIF DE TRAITEMENT DE LA SURFACE DE SEMI-CONDUCTEURS PAR BOMBARDEMENT DE PARTICULES
Abstract: front page image
(EN)A process for erosion and structuring of the surface of semiconductors and for producing surface doping by particle bombardment, using a plasma jet. A process for extraction of a plasma jet from a low-pressure plasma and a device for carrying out the process. The new process can be used for the surface treatment of metal work-pieces and of insulating surfaces.
(FR)Selon un procédé d'érosion et de structuration de surfaces de semi-conducteurs et de production de dopages de surface par bombardement de particules, on utilise un faisceau de plasma pour le bombardement de particules. Un procédé et un dispositif permettent d'extraire un faisceau de plasma d'un plasma à basse pression. On peut utiliser ce nouveau procédé pour traiter des pièces métalliques et des surfaces isolantes.
Designated States: AU, BG, BR, DK, FI, HU, JP, KP, KR, NO, RO, SU, US.
European Patent Office (AT, BE, CH, DE, FR, GB, IT, LU, NL, SE)
African Intellectual Property Organization (BJ, CF, CG, CM, GA, ML, MR, SN, TD, TG).
Publication Language: German (DE)
Filing Language: German (DE)