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1. WO1987006306 - FILTER PUMP HEAD ASSEMBLY

Publication Number WO/1987/006306
Publication Date 22.10.1987
International Application No. PCT/US1986/002380
International Filing Date 30.10.1986
IPC
B01D 29/11 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
29Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/-B01D27/170;   Filtering elements therefor
11with bag, cage, hose, tube, sleeve or like filtering elements
B01D 35/26 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
35Filtering devices having features not specifically covered by groups B01D24/-B01D33/, or for applications not specifically covered by groups B01D24/-B01D33/230; Auxiliary devices for filtration; Filter housing constructions
26Filters with built-in pumps
B01D 35/30 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
35Filtering devices having features not specifically covered by groups B01D24/-B01D33/, or for applications not specifically covered by groups B01D24/-B01D33/230; Auxiliary devices for filtration; Filter housing constructions
30Filter housing constructions
B01D 36/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
36Filter circuits or combinations of filters with other separating devices
CPC
B01D 2201/302
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
2201Details relating to filtering apparatus
30Filter housing constructions
301Details of removable closures, lids, caps, filter heads
302having inlet or outlet ports
B01D 29/114
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
29Other filters with filtering elements stationary during filtration, e.g. pressure or suction filters, or filtering elements therefor
11with bag, cage, hose, tube, sleeve or like filtering elements
114arranged for inward flow filtration
B01D 29/41
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
29Other filters with filtering elements stationary during filtration, e.g. pressure or suction filters, or filtering elements therefor
39with hollow discs side by side on, or around, one or more tubes, e.g. of the leaf type
41mounted transversely on the tube
B01D 29/822
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
29Other filters with filtering elements stationary during filtration, e.g. pressure or suction filters, or filtering elements therefor
76Handling the filter cake in the filter for purposes other than for regenerating
80for drying
82by compression
822using membranes
B01D 35/26
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
35Other filtering devices; Auxiliary devices for filtration; Filter housing constructions
26Filters with built-in pumps ; filters provided with a pump mounted in or on the casing
B01D 35/30
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
35Other filtering devices; Auxiliary devices for filtration; Filter housing constructions
30Filter housing constructions
Applicants
  • SWAIN, Danny, C. [US]/[US]
Inventors
  • SWAIN, Danny, C.
Agents
  • HUGHES, Michael, J.
Priority Data
852,22115.04.1986US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) FILTER PUMP HEAD ASSEMBLY
(FR) ENSEMBLE DE TETE DE POMPE A FILTRE
Abstract
(EN) A filter pump head assembly (10) is adapted for use with pneumatic pumping control systems. The assembly includes a rigid case subassembly (12) enclosing a chemically inert liner subassembly (14) which encloses a filter subassembly (16). The liner subassembly (14) includes a pneumatically deformable pumping membrane (72), the deformation of which varies the volume surrounding a filter cartridge (112). Various valves (33, 34 and 35) and pots are operated by selective pneumatic pressure on a top membrane (68). The control block (80) includes a bubble capture channel (94) which allows the bleeding of undesirable gas bubbles during use. The inventive pump of the various disclosed embodiments is particularly adapted to pump and filter ultrapure, reactive fluids varying viscosities at a low pumping pressure. The primary current commercial usage of the invention is in the semiconductor manufacturing industry.
(FR) Un ensemble (10) de tête de pompe à filtre est conçu pour être utilisé avec des sytèmes de commande de pompage pneumatique. L'ensemble comporte un sous-sensemble (12) à boîtier rigide contenant un sous-sensemble (14) de chemise chimiquement inerte renfermant un sous-ensemble de filtre (16). Le sous-sensemble de chemise (14) comporte une membrane de pompage (72) pneumatiquement déformable, dont la déformation modifie le volume qui entoure une cartouche de filtre (112). Diverses valves (33, 34 et 35) et divers orifices sont actionnés par l'application sélective de pression pneumatique sur une membrane supérieure (68). Le bloc de commande (80) comporte un canal (94) de captage de bulles, qui permet de purger les bulles de gaz non désirées pendant l'utilisation. La pompe faisant l'objet de l'invention, caractérisée par les diverses réalisations décrites, est particulièrement adaptée au pompage et au filtrage de fluides réactifs ultra-purs de viscosité variable à de faible pressions de pompage. Le premier utilisateur commercial de l'invention est actuellement l'industrie de fabrication des semiconducteurs.
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