WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO1986006875) ION IMPLANT USING ALKALI OR ALKALINE EARTH METAL TETRAFLUOROBORATE AS BORON ION SOURCE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1986/006875    International Application No.:    PCT/US1985/000932
Publication Date: 20.11.1986 International Filing Date: 17.05.1985
IPC:
C30B 31/22 (2006.01)
Applicants: J.C. SCHUMACHER COMPANY [US/US]; 580 Airport Road, Oceanside, CA 92054 (US) (For All Designated States Except US).
LAGENDIJK, Andre [NL/US]; (US) (For US Only).
RIAHI, Shantia [US/US]; (US) (For US Only)
Inventors: LAGENDIJK, Andre; (US).
RIAHI, Shantia; (US)
Agent: HUBBARD, Grant, L. @; Hubbard, Stetina & Brunda, 24221 Calle de la Louisa, Suite 401, Laguna Hills, CA 92653 (US)
Priority Data:
Title (EN) ION IMPLANT USING ALKALI OR ALKALINE EARTH METAL TETRAFLUOROBORATE AS BORON ION SOURCE
(FR) IMPLANTATION IONIQUE UTILISANT DES TETRAFLUOROBORATES ALCALIN OU D'UN METAL ALCALINO-TERREUX EN TANT QUE SOURCE D'IONS DE BORE
Abstract: front page image
(EN)Metal tetrafluoroborates, alkali and alkaline earth tetrafluoroborates in particular, and preferably lithium tetrafluoroborate as ion source material (24) contained in charge forming device (22) formed of quartz, polymer or borosilicate glass. The novel use of the source materials overcomes the problem associated with handling of the otherwise toxic materials (for example, BF2, BF3) without sacrificing the ion current density.
(FR)Utilisation de tétrafluoroborates métalliques, notamment de tétrafluoroborates alcalins et alcalino-terreux, et de préférence de tétrafluoroborate de lithium en tant que matériau de source d'ions (24) contenu dans un dispositif (22) de verre de formation de charge composé de quartz, de polymère ou de verre de borosilicate. L'utilisation de ces matériaux de source permet de résoudre le problème posé par la manipulation de substances toxiques (par exemple BF2, BF3) sans réduction de la densité du courant ionique.
Designated States: AU, DK, FI, JP, KP, MC, NO, SU, US.
European Patent Office (AT, BE, CH, DE, FR, GB, IT, LU, NL, SE).
Publication Language: English (EN)
Filing Language: English (EN)