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1. WO1985000086 - IMPROVED INSTALLATION FOR FLOATING TRANSPORT AND PROCESSING OF SUBSTRATES

Publication Number WO/1985/000086
Publication Date 03.01.1985
International Application No. PCT/NL1984/000018
International Filing Date 15.06.1984
IPC
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
H01L 21/67784
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67784using air tracks
Y10T 156/1089
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
156Adhesive bonding and miscellaneous chemical manufacture
10Methods of surface bonding and/or assembly therefor
1089of discrete laminae to single face of additional lamina
Applicants
  • BOK, Edward [NL]/[NL]
Inventors
  • BOK, Edward
Priority Data
830216316.06.1983NL
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) IMPROVED INSTALLATION FOR FLOATING TRANSPORT AND PROCESSING OF SUBSTRATES
(FR) INSTALLATION AMELIOREE POUR LE TRANSPORT ET LE TRAITEMENT FLOTTANT DE SUBSTRATS
Abstract
(EN)
Improved process installation (10) for double floating transport and processing of substrates (30), consisting of successive transporters (18) with process slots (28) positioned in between and tape (80) as transporting means for said substrates (30) and whereby tensioning means (24), (96) and (104) prevent an unallowable deformation of the transporters (18) and tape (80) during the processing with accompanying heat development.
(FR)
Installation améliorée de traitement (10) pour le transport et le traitement flottant de substrats (30), formée de convoyeurs successifs (18) séparés par des fentes de traitement (28) et d'un ruban (80) servant de mécanisme de transport pour lesdits substrats (30), grâce à quoi les mécanismes de tension (24), (96) et (104) empêchent une déformation inadmissible des convoyeurs (18) et du ruban (80) pendant le traitement accompagné d'un développement de chaleur.
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