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1. WO1985000071 - ELECTRON EMISSION SYSTEM

Publication Number WO/1985/000071
Publication Date 03.01.1985
International Application No. PCT/US1984/000878
International Filing Date 08.06.1984
IPC
H01J 1/304 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02Main electrodes
30Cold cathodes
304Field-emissive cathodes
H01J 37/073 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06Electron sources; Electron guns
073Electron guns using field emission, photo emission, or secondary emission electron sources
CPC
H01J 1/304
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02Main electrodes
30Cold cathodes, e.g. field-emissive cathode
304Field-emissive cathodes
H01J 2237/06316
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
06Sources
063Electron sources
06308Thermionic sources
06316Schottky emission
H01J 37/073
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06Electron sources; Electron guns
073Electron guns using field emission, photo emission, or secondary emission electron sources
Applicants
  • AMERICAN TELEPHONE & TELEGRAPH COMPANY [US]/[US]
Inventors
  • LIU, Ruichen
  • THOMSON, Michael, George
Agents
  • HIRSCH, A., E., Jr. @
Priority Data
504,67115.06.1983US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) ELECTRON EMISSION SYSTEM
(FR) SYSTEME D'EMISSION ELECTRONIQUE
Abstract
(EN)
An electron emission system includes a high-brightness field-emitter cathode (10). Advantageously, the tip (22) of the cathode is shaped to minimize structural variations caused by surface tension forces. In addition, an electrode assembly (30, 34) associated with the cathode (10) is designed to establish electric field forces that are opposite and at least approximately equal to the surface tension forces acting on the tip. The electric field forces can be adjusted to establish a highly stable operating condition without altering the value of electron beam energy for which the overall system was designed. Moreover, the current density of the beam (42) at a writing surface can be selectively varied without changing prescribed operating parameters of the cathode (10). The resulting system is characterized by excellent emission stability, low noise and a useful operating life of at least several thousand hours.
(FR)
Un système d'émission électronique comporte une cathode à émission de champ (10) de luminosité élevée. L'extrémité (22) de la cathode est façonnée avantageusement de manière à minimiser les variations de structure provoquées par les forces de tension superficielle. En outre, un montage d'électrodes (30, 34) associé à la cathode (10) est conçu pour établir des forces de champ électrique qui sont opposées et au moins approximativement égales aux forces de tension superficielle agissant sur l'extrémité. Les forces de champ électrique peuvent être ajustées pour créer une condition de fonctionnement extrêmement stable sans modifier la valeur de l'énergie du rayon électronique pour laquelle le système dans son ensemble a été conçu. De plus, la densité de courant du rayon (42) à une surface d'écriture peut être modifiée de manière sélective sans modifier les paramètres de fonctionnement prescrits de la cathode (10). Le système résultant se caractérise par une excellente stabilité d'émission, un bruit réduit et une durée de fonctionnement utile d'au moins plusieurs milliers d'heures.
Also published as
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