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Machine translation
1. (WO1984003412) TRACK FOR FLOATING TRANSPORT OF SUBSTRATES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1984/003412    International Application No.:    PCT/NL1984/000004
Publication Date: 30.08.1984 International Filing Date: 20.02.1984
IPC:
H01L 21/677 (2006.01)
Applicants:
Inventors:
Priority Data:
  30.12.1899 null
Title (EN) TRACK FOR FLOATING TRANSPORT OF SUBSTRATES
(FR) CHEMIN POUR LE TRANSPORT FLOTTANT DE SUBSTRATS
Abstract: front page image
(EN)Installation for transport of substrates (74), at least consisting of a main transport track (10), including a series of transporters (16), which are succesively positioned in the direction of movement of said substrates (74) for a two-sided floating trasport of said substrates (74) through a track passage (18), located in between transporters sections (20) and (22) and whereby means are included for at least locally a change of the movement in linear direction of said substrates (74).
(FR)Installation pour le transport de substrats (74), formée au moins d"un chemin de transport principal (10), contenant une série de transporteurs (16) qui sont placés successivement dans la direction du mouvement desdits substrats (74) pour effectuer un transport flottant bilatéral desdits substrats (74) par un passage de chemin (18) situé entre les sections de transporteurs (20) et (22), et comportant des mécanismes pour modifier au moins localement le mouvement en direction linéaire desdits substrats (74).
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)