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Machine translation
1. (WO1983002339) PHOTO- AND ELECTRON RESIST
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1983/002339    International Application No.:    PCT/SU1981/000078
Publication Date: 07.07.1983 International Filing Date: 21.12.1981
IPC:
G03F 7/09 (2006.01)
Applicants: INSTITUT KHIMII AKADEMII NAUK SSSR [SU/SU]; Ul.Tropinina, 49, Pochtamt, GSP-445, Gorky, 603600 (SU) (For All Designated States Except US).
MOLODNYAKOV, Sergey, Petrovich [SU/SU]; (SU) (For US Only).
FEDOROV, Yury, Ivanovich [SU/SU]; (SU) (For US Only).
KUZNETSOV, Vitaly, Alekseevich [SU/SU]; (SU) (For US Only).
EGOROCHKIN, Aleksey, Nikolaevich [SU/SU]; (SU) (For US Only).
BIRYUKOVA, Tamara, Grigorevna [SU/SU]; (SU) (For US Only).
RAZUVAEV, Grigory, Alekseevich [SU/SU]; (SU) (For US Only)
Inventors: MOLODNYAKOV, Sergey, Petrovich; (SU).
FEDOROV, Yury, Ivanovich; (SU).
KUZNETSOV, Vitaly, Alekseevich; (SU).
EGOROCHKIN, Aleksey, Nikolaevich; (SU).
BIRYUKOVA, Tamara, Grigorevna; (SU).
RAZUVAEV, Grigory, Alekseevich; (SU)
Agent: THE USSR CHAMBER OF COMMERCE AND INDUSTRY; ul. Kuibysheva, 5/2, Moscow, 103012 (SU)
Priority Data:
Title (EN) PHOTO- AND ELECTRON RESIST
(FR) VERNIS PHOTOSENSIBLE ET SENSIBLE AUX ELECTRONS
Abstract: front page image
(EN)The photo- and electron resist contains a light-sensitive compound, a film-forming compound, a sensitizer, an organic solvent, an additive which forms a donor-acceptor complex with said compounds and reaction products thereof, which complex quenches the luminescence and improves the stability of the resist. The photo- and electron resist finds application in microelectronics, optics, printing arts, precise mechanical engineering, where structures of semiconductor devices and solid-state circuit are fabricated through the use of the resists.
(FR)Le vernis photosensible et sensible aux électrons comprend un composé sensible à la lumière, un composé de formation d'un film, un agent de sensibilisation, un solvant organique, un additif qui forme un complexe donneur-accepteur avec ces composés et leurs produits de réaction, lequel complexe amortit la luminescence et améliore la stabilité du vernis. Le vernis photosensible et sensible aux électrons s'applique en microélectronique, en mécanique de précision dans les arts graphiques et dans le domaine de l'optique, dans lesquels des structures de dispositif à semiconducteurs et des circuits intégrés sont fabriqués en utilisant ces vernis.
Designated States: DE, GB, JP, US.
Publication Language: Russian (RU)
Filing Language: Russian (RU)