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Machine translation
1. (WO1981003628) PROCESS FOR FORMING A DEFECT-FREE PHOTOMASK OR REPAIRING DEFECTS IN AN EXISTING PHOTOMASK AND PRODUCT THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1981/003628    International Application No.:    PCT/US1981/000825
Publication Date: 24.12.1981 International Filing Date: 18.06.1981
IPC:
B05D 1/32 (2006.01), B05D 3/06 (2006.01), G03F 1/72 (2012.01), H01L 21/027 (2006.01), H01L 21/30 (2006.01)
Applicants:
Inventors:
Priority Data:
160978 19.06.1980 US
Title (EN) PROCESS FOR FORMING A DEFECT-FREE PHOTOMASK OR REPAIRING DEFECTS IN AN EXISTING PHOTOMASK AND PRODUCT THEREOF
(FR) PROCEDE DE FORMATION D'UN PHOTOMASQUE SANS DEFAUT OU DE REPARATION DE DEFECTUOSITES DANS UN PHOTOMASQUE EXISTANT, ET PRODUIT OBTENU PAR CELUI-CI
Abstract: front page image
(EN)A process for forming a defect-free photomask consisting of an opaque layer overlying a transparent substrate or for repairing transparent defects in an opaque layer (chromium film) overlying a transparent substrate which process comprises applying a coating material (coating material) which absorbs radiant energy to the surface of the substrate, directing a beam of radiant energy (laser) through the substrate onto the coating material at points to be made opaque so as to fuse the coating material and the substrate at their interface thereby forming an opaque layer (treated area) on said substrate, and removing from the surface the unfused coating material (residue).
(FR)Procede de formation d'un photomasque sans defaut consistant en une couche opaque recouvrant un substrat transparent ou de reparation de defauts transparents dans une couche opaque (film de chrome) recouvrant un substrat transparent, lequel procede consiste a appliquer un materiau d'enrobage (materiau d'enrobage) qui absorbe l'energie radiante sur la surface du substrat, a diriger un rayon d'energie radiante (laser) au travers du substrat sur le materiau d'enrobage en des points devant etre rendus opaques de maniere a fusionner le materiau d'enrobage et le substrat au niveau de leur interface pour former une couche opaque (region traitee) sur ce substrat, et enlever de la surface le materiau d'enrobage non fusionne (residu).
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)