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Machine translation
1. (WO1981003344) IMPLANTATION OF VAPORIZED MATERIAL ON MELTED SUBSTRATES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1981/003344    International Application No.:    PCT/US1981/000582
Publication Date: 26.11.1981 International Filing Date: 01.05.1981
IPC:
C23C 14/02 (2006.01), C23C 14/48 (2006.01), C30B 1/02 (2006.01), C30B 31/22 (2006.01)
Applicants:
Inventors:
Priority Data:
149234 12.05.1980 US
Title (EN) IMPLANTATION OF VAPORIZED MATERIAL ON MELTED SUBSTRATES
(FR) IMPLANTATION DE MATERIAU VAPORISE SUR DES SUBSTRATS FONDUS
Abstract: front page image
(EN)Implantation of a particle flux (200), for example a laser produced particle flux, upon a substrate (5) is enhanced by premelting the substrate surface with a beam of radiation (110) from a pulsed high energy source (2) such as a laser source. The premelting is provided prior to the arrival of the particle flux in order that the particle flux impinge upon an area of the substrate which is melted.
(FR)L'implantation d'un flux de particules (200), par exemple un flux de particules produit au laser, sur un substrat (5) est amelioree en fondant au prealable la surface du substrat avec un rayon (110) provenant d'une source de haute energie pulsee (2) telle qu'une source de rayon laser. La pre-fusion s'effectue avant l'arrivee du flux de particules de maniere telle que ce flux de particules entre en collision avec une zone du substrat qui est fondue.
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)