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Machine translation
1. (WO1981003168) HIGH PRESSURE PLASMA HYDROGENATION OF SILICON TETRACHLORIDE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1981/003168    International Application No.:    PCT/US1981/000462
Publication Date: 12.11.1981 International Filing Date: 06.04.1981
IPC:
B01J 12/00 (2006.01), C01B 33/107 (2006.01)
Applicants:
Inventors:
Priority Data:
148094 09.05.1980 US
Title (EN) HIGH PRESSURE PLASMA HYDROGENATION OF SILICON TETRACHLORIDE
(FR) HYDROGENATION DE TETRACHLORURE DE SILICIUM AU MOYEN DE PLASMA A HAUTE PRESSION
Abstract: front page image
(EN)A method for the plasma hydrogenation of SiCl4. A high pressure plasma (16) is utilized to effect a reaction of H2 (44) and SiCl4 (42) to form HSiCl3 and other hydrogenated silicon chlorides which can be separated from H2 and HCl by-product by passing the output gases from reactor (50) to condensation apparatus (56).
(FR)Procede d'hydrogenation de SiCl4 au moyen de plasma. Un plasma a haute pression (16) est utilise pour produire une reaction entre H2 (44) et SiCl4 (42) pour former du HSiCl3 et d'autres chlorures de silicium hydrogenes qui peuvent etre separes du H2 et du sous-produit du HCl en faisant passer les gaz de sortie du reacteur (50) dans un dispositif de condensation (56).
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)