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Machine translation
1. (WO1981001629) FINE-LINE SOLID STATE DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1981/001629    International Application No.:    PCT/US1980/001384
Publication Date: 11.06.1981 International Filing Date: 20.10.1980
IPC:
H01L 21/3205 (2006.01), H01L 21/768 (2006.01), H01L 23/532 (2006.01)
Applicants:
Inventors:
Priority Data:
98979 30.11.1979 US
Title (EN) FINE-LINE SOLID STATE DEVICE
(FR) DISPOSITIF A CIRCUITS INTEGRES A LIGNES FINES
Abstract: front page image
(EN)Aluminum electrically conducting patterns (71, 72) for integrated circuits (10) are achieved with narrow lines (73-75) and unexpectedly-high electromigration characteristics by making the crystal grains (42-45) of the pattern into a chain-shaped structure with all of the grains (42-45) in the same (111) orientation. A process for achieving the structure is also described (in fig 5).
(FR)Des configurations en aluminium electriquement conductrices (71, 72) pour des circuits integres (10) sont obtenues avec des lignes etroites (73-75) et des caracteristiques d'electro-migration etonnamment elevees en disposant les grains de cristaux (42-45) de la configuration dans une structure en forme de chaine, tous les grains (42-45) ayant la meme (111) orientation. Un procede pour obtenir la structure est egalement decrit (Fig. 5).
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)