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Machine translation
1. (WO1981000681) BOAT FOR WAFER PROCESSING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1981/000681    International Application No.:    PCT/US1980/000706
Publication Date: 19.03.1981 International Filing Date: 06.06.1980
IPC:
C30B 25/12 (2006.01), C30B 31/14 (2006.01)
Applicants:
Inventors:
Priority Data:
76045 17.09.1979 US
Title (EN) BOAT FOR WAFER PROCESSING
(FR) NACELLE POUR LE TRAITEMENT DE TRANCHES
Abstract: front page image
(EN)A boat for use in wafer processing technology such as associated with semiconductor wafers. The boat consists of a relatively flat bottom plate (20) having a plurality of substantially parallel V-cut notches (37) therein on which the bottom of the wafer (11) rests and two parallel side rails (38, 39) disposed above and on either side of the flat bottom plate (20) for holding the sides of the wafer (11). The two side rails (38, 39) include a plurality of opposed U-shaped notches (40) cut in parallel along the inner surface of the side rails (38, 39) for movably securing the opposite side edges of the wafer placed in the boat, each pair of opposed U-shaped notches (40) being offset with respect to a V-cut notch (37) operatively associated therewith.
(FR)Nacelle utilisee dans la technologie de traitement des tranches telles que des tranches a semi-conducteurs. La nacelle consiste en une plaque de fond relativement plate (20) ayant une pluralite d"entailles en V sensiblement paralleles (37) sur laquelle le fond de la tranche (11) repose, et deux rails lateraux paralleles (38, 39) disposes au dessus et de chaque cote de la plaque de fond plat (20) pour tenir les cotes de la tranche (11). Les deux rails lateraux (38, 39) possedent une pluralite d"entailles opposees en forme de U (40) decoupees en parallele sur la surface interieure des rails lateraux (38, 39) pour fixer de maniere amovible les bords lateraux opposes de la tranche placee dans la nacelle, chaque paire d"entailles opposees en forme de U (40) etant decalee par rapport a une entaille en V (37) associee de maniere effective.
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)