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Machine translation
1. (WO1980002752) ACCELERATED PARTICLE LITHOGRAPHIC PROCESSING AND ARTICLES SO PRODUCED
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1980/002752    International Application No.:    PCT/US1980/000580
Publication Date: 11.12.1980 International Filing Date: 19.05.1980
IPC:
G03F 7/038 (2006.01), G03F 7/20 (2006.01), H01L 21/027 (2006.01)
Applicants:
Inventors:
Priority Data:
44073 31.05.1979 US
Title (EN) ACCELERATED PARTICLE LITHOGRAPHIC PROCESSING AND ARTICLES SO PRODUCED
(FR) PROCEDE LITHOGRAPHIQUE A PARTICULES ACCELEREES ET ARTICLES AINSI PRODUITS.
Abstract: front page image
(EN)Ion beam lithography of particular interest in the fabrication of large-scale integrated circuits of unexpectedly increased throughput results from appropriate choice of (a) resist material and (b) ion species. Resist material, generally negative acting, is characterized by electron beam sensitivity inadequate for ordinary commercial electron beam lithography. The relevant characteristic responsible for inadequate electron beam sensitivity is the very characteristic responsible for enhanced ion sensitivity. Ion species, always of atomic number greater than that of proton, are dictated by the observation that sensitivity unexpectedly increases at a greater rate than predictable on traditional bases.
(FR)La lithographie, par rayons ioniques presente un interet particulier dans la fabrication de circuits integres a grande echelle, dont la capacite de traitement etonnamment elevee est le resultat du choix approprie du a) materiau de reserve et b) des especes d"ions. Le materiau de reserve, generalement a action negative, est caracterise par une sensibilite aux rayons electroniques inadequate a la lithographie commerciale ordinaire aux rayons electroniques. La caracteristique pertinente responsable de la sensibilite inadequate aux rayons electroniques est la caracteristique meme responsable d"une sensibilite ionique accrue. Les especes ioniques, toujours de nombre atomique plus grand que celui du proton, sont dictees par l"observation que la sensibilite augmente de maniere inattendue a une vitesse plus grande qu"elle n"est previsible d"une maniere traditionnelle.
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)