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Machine translation
1. (WO1980002622) BOAT FOR CONVEYING SEMICONDUCTOR SUBSTRATES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1980/002622    International Application No.:    PCT/JP1980/000099
Publication Date: 27.11.1980 International Filing Date: 09.05.1980
IPC:
C30B 31/10 (2006.01)
Applicants:
Inventors:
Priority Data:
79/62674 11.05.1979 JP
Title (EN) BOAT FOR CONVEYING SEMICONDUCTOR SUBSTRATES
(FR) BATEAU DE TRANSPORT DE SUBSTRAT A SEMI-CONDUCTEUR
Abstract: front page image
(EN)In a boat (2) with wheels (3) for conveying semiconductor substrates, friction surfaces in the wheel system are coated with a silicon nitride layer (8) so as to prevent fouling phenomena in processes of diffusion, oxidation and annealing.
(FR)Dans un bateau (2) avec des roues (3) de transport de substrats semi-conducteurs, des surfaces de friction dans le systeme des roues sont revetues d"une couche de nitrure de silicium (8) afin d"empecher le phenomene d"encrassement de se produire dans les procedes de diffusion, oxydation et recuit.
Designated States:
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)