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Machine translation
1. (WO1980001847) NEGATIVE X-RAY RESIST CONTAINING POLY(2,3-DICHLORO-1-PROPYL ACRYLATE)AND POLY(GLYCIDYL METHACRYLATE-CO-ETHYL ACRYLATE)
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1980/001847    International Application No.:    PCT/US1980/000127
Publication Date: 04.09.1980 International Filing Date: 11.02.1980
IPC:
C08L 33/16 (2006.01), G03F 7/038 (2006.01), C08L 33/06 (2006.01)
Applicants:
Inventors:
Priority Data:
14243 22.02.1979 US
Title (EN) NEGATIVE X-RAY RESIST CONTAINING POLY(2,3-DICHLORO-1-PROPYL ACRYLATE)AND POLY(GLYCIDYL METHACRYLATE-CO-ETHYL ACRYLATE)
(FR) RESERVE NEGATIVE A RAYONS-X, CONTENANT DU POLY(ACRYLATE DE 2,3-DICHLORO-1-PROPYLE) ET DU POLY(METHACRYLATE DE GLYCIDYLE-CO-ACRYLATE D"ETHYLE)
Abstract: front page image
(EN)Negative x-ray resists useful in the production of high-resolution patterned images. The x-ray resist contains a mixture of poly(2,3-dichloro-1-propyl acrylate) and poly(glycidyl methacrylate-co-ethyl acrylate), with the latter forming between 1 percent and 20 percent by weight, of the total polymer mixture. This ray resist has adhesive and resolving properties superior to those of poly(2,3-dichloro-1-propyl acrylate). Superior properties of the mixture are attributed to the fact that the two polymers form a compatible polymer mixture which is a relatively rare and unpredictable event in polymer chemistry.
(FR)Reserve negative a rayons-X utilisable pour la production d"images de haute resolution. La reserve a rayons X comprend un melange de poly(acrylate de 2,3-dichloro-1-propyle) et de poly(methacrylate de glycidyle-co-acrylate d"ethyle), ce dernier formant entre 1% et 20% en poids du melange total du polymere. Cette reserve possede des proprietes d"adhesion et de resolution superieures a celles du poly(acrylate de 2,3,-dichloro-1-propyle). Les proprietes superieures du melange sont attribuees aux fait que les deux poylmeres forment un melange compatible de polymeres, ce qui est un evenement relativement rare et imprevisible dans la chimie des polymeres.
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)