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Machine translation
1. (WO1980001722) PROCESS AND EQUIPMENT FOR COPYING MASKS ON A PIECE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1980/001722    International Application No.:    PCT/EP1980/000007
Publication Date: 21.08.1980 International Filing Date: 07.02.1980
IPC:
G03F 9/00 (2006.01)
Applicants:
Inventors:
Priority Data:
2905636 14.02.1979 DE
Title (EN) PROCESS AND EQUIPMENT FOR COPYING MASKS ON A PIECE
(FR) PROCEDE ET INSTALLATION POUR COPIER DES MASQUES SUR UNE PIECE
Abstract: front page image
(EN)To copy masks on a piece, particularly to copy them by projection on a semiconductor substrate with a view to producing integrated circuits, a model of the mask is reproduced successively on respective predetermined areas of the piece, by translation of the piece in the image plane. In order to enhance the precision of the different images, the alignment mis existing between the image of the mask model and the predetermined area on the piece is determined, during the reproduction, and the predetermined value of the translation of the piece for the area intended to a next image or the mask position is corrected by an amount equal to the alignment error.
(FR)Pour copier des masques sur une piece, en particulier pour les copier par projection sur un substrat semi-conducteur en vue de la fabrication de circuits integres, on reproduit successivement, par translation de la piece dans le plan de l"image, un modele du masque sur des zones respectives predeterminees de la piece. Afin d"augmenter la precision des differentes images on determine, pendant la reproduction, le defaut d"alignement existant entre l"image du modele du masque et la zone predeterminee sur la piece, et on corrige, d"une quantite egale a l"erreur d"alignement, la valeur predeterminee de la translation de la piece pour la zone destinee a une image suivante ou la position du masque.
Designated States:
Publication Language: German (DE)
Filing Language: German (DE)