WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO1980000073) DIFFUSION BOAT AND GRIP
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1980/000073    International Application No.:    PCT/US1979/000405
Publication Date: 24.01.1980 International Filing Date: 12.06.1979
IPC:
B65G 7/12 (2006.01), H01L 21/687 (2006.01)
Applicants:
Inventors:
Priority Data:
914972 12.06.1978 US
Title (EN) DIFFUSION BOAT AND GRIP
(FR) NACELLE DE DIFFUSION ET PREHENSION
Abstract: front page image
(EN)A tool is disclosed for gripping an elongated transport or diffusion boat (10) having a concave surface extending from end to end which is grooved (11) repeatedly in one direction to support each of a plurality of disc like semiconductor wafers peripherally in vertical side-by-side relationship. Each end of the boats is provided with a pair of horizontally aligned spaced apart notches (14), (15), (16) and (17). The tool for gripping the boat consists of a pair of spaced apart parallel arm members (33) and (34) each of which carries a pair of linearly aligned finger sections (46) and (47) adapted for removable insertion into the notches. Means are provided to move the arm members (33) and (34) laterally toward each other thereby to insert the fingers (46) and (47) simultaneously into all of the notches (14), (15), (16) and (17) to grip the boat (10).
(FR)Un outil de prehension d"une nacelle allongee de transport ou diffusion (10) possede une surface concave s"etendant d"une extremite a l"autre qui est rainuree (11) de maniere repetee dans une direction pour supporter une pluralite de disque telles que des tranches a semi-conducteur placees sur la peripherie de maniere verticale et cote a cote. Chaque extremite des nacelles est pourvue d"une paire d"entailles alignees espacees horizontalement (14), (15), (16) et (17). L"outil de prehension de la nacelle consiste en une paire de bras paralleles espaces l"un de l"autre (33 et 34) qui portent chacun un paire de doigts alignes lineairement (46 et 47) adaptes pour etre introduits de maniere amovible dans les entailles. Des moyens sont pourvus pour deplacer les bras (33 et 34) lateralement l"un vers l"autre de maniere a introduire les doigts (46 et 47) simultanement dans toutes les entailles (14, 15, 16 et 17) pour saisir la nacelle (10).
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)