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1. (WO1980000073) DIFFUSION BOAT AND GRIP
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1980/000073 International Application No.: PCT/US1979/000405
Publication Date: 24.01.1980 International Filing Date: 12.06.1979
IPC:
B65G 7/12 (2006.01) ,H01L 21/687 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
7
Devices for assisting manual moving or tilting heavy loads
12
Load-carriers, e.g. hooks, slings, harness, gloves, modified for load-carrying
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
687
using mechanical means, e.g. chucks, clamps or pinches
Applicants:
Inventors:
Priority Data:
91497212.06.1978US
Title (EN) DIFFUSION BOAT AND GRIP
(FR) NACELLE DE DIFFUSION ET PREHENSION
Abstract:
(EN) A tool is disclosed for gripping an elongated transport or diffusion boat (10) having a concave surface extending from end to end which is grooved (11) repeatedly in one direction to support each of a plurality of disc like semiconductor wafers peripherally in vertical side-by-side relationship. Each end of the boats is provided with a pair of horizontally aligned spaced apart notches (14), (15), (16) and (17). The tool for gripping the boat consists of a pair of spaced apart parallel arm members (33) and (34) each of which carries a pair of linearly aligned finger sections (46) and (47) adapted for removable insertion into the notches. Means are provided to move the arm members (33) and (34) laterally toward each other thereby to insert the fingers (46) and (47) simultaneously into all of the notches (14), (15), (16) and (17) to grip the boat (10).
(FR) Un outil de prehension d"une nacelle allongee de transport ou diffusion (10) possede une surface concave s"etendant d"une extremite a l"autre qui est rainuree (11) de maniere repetee dans une direction pour supporter une pluralite de disque telles que des tranches a semi-conducteur placees sur la peripherie de maniere verticale et cote a cote. Chaque extremite des nacelles est pourvue d"une paire d"entailles alignees espacees horizontalement (14), (15), (16) et (17). L"outil de prehension de la nacelle consiste en une paire de bras paralleles espaces l"un de l"autre (33 et 34) qui portent chacun un paire de doigts alignes lineairement (46 et 47) adaptes pour etre introduits de maniere amovible dans les entailles. Des moyens sont pourvus pour deplacer les bras (33 et 34) lateralement l"un vers l"autre de maniere a introduire les doigts (46 et 47) simultanement dans toutes les entailles (14, 15, 16 et 17) pour saisir la nacelle (10).
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)