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Machine translation
1. (WO1979000876) AUTOMATIC PHOTOMASK INSPECTION SYSTEM AND APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1979/000876    International Application No.:    PCT/US1979/000207
Publication Date: 01.11.1979 International Filing Date: 02.04.1979
IPC:
G01B 11/00 (2006.01), G01B 11/24 (2006.01), G01B 11/245 (2006.01), G01B 11/30 (2006.01), G01C 3/00 (2006.01), G01C 3/06 (2006.01), G01N 21/88 (2006.01), G01N 21/93 (2006.01), G01N 21/956 (2006.01), G02B 7/32 (2006.01), G03F 1/84 (2012.01), H01L 21/302 (2006.01)
Applicants:
Inventors:
Priority Data:
892972 03.04.1978 US
Title (EN) AUTOMATIC PHOTOMASK INSPECTION SYSTEM AND APPARATUS
(FR) SYSTEME AUTOMATIQUE D"INSPECTION DES PHOTOMASQUES ET APPAREIL
Abstract: front page image
(EN)Optical inspection apparatus for detecting differences between two dies in a photomask and including a carriage (30) for supporting the objects (34) to be inspected and for simultaneously moving such objects along an inspection path, an illuminator (44) for illuminating corresponding portions of the objects as they are moved along the inspection path, electro-optical detectors (46, 52 and 48, 54) for individually inspecting the illuminated portions and for developing first and second electrical signals respectively corresponding thereto, electronic memories (58 and 60) for storing the first and second electrical signals, microprocessor (64) for scanning the memories and for electronically aligning a readout of the first signal relative to a readout of the second signal, and for comparing the electronically aligned signals and indicating any differences therebetween.
(FR)Appareil d"inspection optique pour detecter des differences entre deux colorations dans un photomasque et comprenant un chariot (30) pour supporter les objets (34) a inspecter et pour les deplacer simultanement le long d"un trajet d"inspection, un dispositif d"eclairage (44) pour illuminer les parties correspondantes des objets lorsqu"ils se deplacent le long du chemin d"inspection, des detecteurs electro-optiques (46, 52 et 48, 54) pour controler individuellement les parties eclairees et pour produire des premier et second signaux electriques leur correspondant respectivement, des memoires electroniques (58 et 60) pour et emmagasiner les premier et second signaux electriques, un microprocesseur (64) pour analyser les me aligner electroniquement une sortie du premier signal par rapport a une sortie du second signal, comparer les signaux electroniquement alignes et indiquer leurs differences.
Designated States:
Publication Language: English (EN)
Filing Language: English (EN)