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Machine translation
1. (WO1979000783) SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1979/000783    International Application No.:    PCT/JP1979/000062
Publication Date: 18.10.1979 International Filing Date: 12.03.1979
IPC:
G01L 9/00 (2006.01), G01L 9/06 (2006.01)
Applicants:
Inventors:
Priority Data:
78/29936 17.03.1978 JP
Title (EN) SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME
(FR) CAPTEURS DE PRESSION A SEMI-CONDUCTEURS AYANT UNE PLURALITE DE DIAPHRAGMES SENSIBLES A LA PRESSION ET LEUR METHODE DE FABRICATION
Abstract: front page image
(EN)A semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms so as to deliver outputs of at least two kinds of pressures as electric signals. This semiconductor pressure sensor comprises a monocrystalline semiconductor chip (1) formed thereon with at least two pressure-sensitive diaphragms (12a, 12b), a pair of strain gauges (13a and 14a, or 13b and 14b) formed on each pressure-sensitive diaphragms of the monocrystalline semiconductor chip, electrodes (15a and 16a, or 15b and 16b) provided on the monocrystalline semiconductor chip to electrically connect the strain gauges with each other, and a substrate (2) of borosilicate glass having the coefficient of thermal expansion, which is substantially equal to that of the monocrystalline semiconductor chip, said monocrystalline semiconductor chip (1) and said glass substrate (2) being bonded together by means of an anodic bonding process. According to this invention, there may be provided the pressure-sensitive sensor has a reduced output error.
(FR)Capteur de pression a semi-conducteur ayant une pluralite de diaphragmes sensibles a la pression de maniere a donner des sorties d"au moins deux types de pression sous forme de signaux electriques. Ce capteur de pression a semi-conducteur comprend une microplaquette monocristalline (1) avec au moins deux diaphragmes sensibles a la pression (12a, 12b), une paire de jauges de contrainte (13a et 14a, ou 13b et 14b) sur chaque diaphragme a pression de la microplaquette monocristalline, des electrodes (15a et 16a, ou 15b et 16b) montees sur la microplaquette monocristslline pour connecter electriquement les jauges de contrainte entre elles, et un substrat (2) de verre de borosilicate dont le coefficient de dilatation thermique est sensiblement le meme que celui de la microplaquette monocristalline, ladite plaquette monocristalline (1) et ledit substrat de verre (2) etant fixes l"un a l"autre par un procede de liaison anodique. Selon cette invention, le capteur sensible a la pression fait moins d"erreurs de sortie.
Designated States:
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)