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Machine translation
1. (WO1979000284) POSITIVE TYPE RESIST POLYMER COMPOSITION AND METHOD OF MAKING RESIST PATTERNS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1979/000284    International Application No.:    PCT/JP1978/000022
Publication Date: 31.05.1979 International Filing Date: 06.11.1978
IPC:
G03F 7/039 (2006.01)
Applicants:
Inventors:
Priority Data:
77/133337 07.11.1977 JP
Title (EN) POSITIVE TYPE RESIST POLYMER COMPOSITION AND METHOD OF MAKING RESIST PATTERNS
(FR) RESERVES DE TYPE POSITIF DE COMPOSITION POLYMERE ET METHODE DE FABRICATION DE MODELES DE RESERVE
Abstract: front page image
(EN)A positive type resist polymer crosslinkable composition resistant to ionizing radiation or ultraviolet rays and composed of the following units (a), (b) and (c) respectively in a polymerized state: (a) a unit derived from methacrylic acid ester which is represented by the formula: CH2 = C(CH3) . COOR (wherein R represents alkyl or haloalkyl radicals having 1 to 6 carbon atoms, benzyl radical or cyclohexyl radical), (b) a unit derived from mono-olefinic unsaturated carboxylic acid having 3 to 12 carbon atoms and 1 to 3 carboxylic radicals, and (c) a unit derived from methacrylic acid chloride. The quantity of unit (b) is such that the number of carboxyl radicals in each unit (b) multiplied by the molarity of the respective unit (b) is equal to about 10 to 20 molar percent of the total molarity of units (a), (b) and (c). The quantity of unit (c) is about 0.05 to 3.0 molar percent of the total molarity of units (a) (b) and (c). The ratio of the molarity of unit (b) multiplied by the number of carboxyl radicals in each unit (b) to the molarity of unit (c) is more than 2/1 but less than 25/1. The polymer composition is preferably a copolymer composed of units (a), (b) and (c) or a composition consisting of a copolymer composed of a part of unit (a) and unit (b) and a copolymer consisting of the residual part of unit (a) with unit (c).
(FR)Une reserve de type positif de composition polymere reticulable agissant contre l"action des radiations ionisantes ou les rayons ultraviolets se compose des elements (a), (b) et (c) suivants, a l"etat polymerise respectivement: (a) un element derive d"un ester d"acide methacrylique, represente par la formule: CH2 = C(CH3) . COOR (ou R represente un radical alkyle ou haloalkyle ayant de 1 a 6 atomes de carbone, un radical benzyle ou un radical cyclobexyle), (b) un element derive d"un acide carboxylique insature mono-olefinique ayant de 3 a 12 atomes de carbone et de 1 a 3 radicaux carboxyliques, et (c) un element derive du chlorure d"acide methracrylique. En quantite de l"element (b) est telle que le nombre de radicaux carboxyle dans chaque element (b) multiplie par la molarite de l"element respectif (b), soit de 10 a 20 environ en pourcentage molaire de la molarite totale des elements (a), (b) et (c). La quantite de l"element (c) est de 0,05 a 3 environ en pourcentage molaire de la molarite totale des elements (a), (b) et (c). Le rapport de la molarite de l"element (b) multiplie par le nombre de radicaux carboxyle dans chaque element (b) avec la molarite de l"element (c) est superieur a 2/1 mais inferieur a 25/1. La composition polymere est, de preference, un copolymere compose des elements (a), (b) et (c) ou une composition consistant en un copolymere compose d"une partie de l"element (a) et de l"element (b) et en un copolymere compose de la partie restante de l"element (a) avec l"element (c).
Designated States:
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)