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1. US20130257301 - Compact, configurable power supply for energizing ozone-producing cells

Office
United States of America
Application Number 13432415
Application Date 28.03.2012
Publication Number 20130257301
Publication Date 03.10.2013
Grant Number 09302912
Grant Date 05.04.2016
Publication Kind B2
IPC
H05B 37/00
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
37Circuit arrangements for electric light sources in general
C01B 13/11
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
13Oxygen; Ozone; Oxides or hydroxides in general
10Preparation of ozone
11by electric discharge
CPC
H01J 37/248
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
248Components associated with high voltage supply
C01B 13/115
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
13Oxygen; Ozone; Oxides or hydroxides in general
10Preparation of ozone
11by electric discharge
115characterised by the electrical circuits producing the electrical discharge
C01B 2201/90
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
2201Preparation of ozone by electrical discharge
90Control of the process
Applicants Ken Tran
MKS Instruments, Inc.
Feng Tian
Xing Chen
Franklin Lee
Inventors Ken Tran
Feng Tian
Xing Chen
Franklin Lee
Agents Burms & Levinson, LLP
Steven M. Mills
Title
(EN) Compact, configurable power supply for energizing ozone-producing cells
Abstract
(EN)

Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.