Processing

Please wait...

Settings

Settings

Goto Application

1. US20130033342 - Plasma resonant cavity

Office
United States of America
Application Number 13647407
Application Date 09.10.2012
Publication Number 20130033342
Publication Date 07.02.2013
Grant Number 09282625
Grant Date 08.03.2016
Publication Kind B2
IPC
H05H 7/18
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
7Details of devices of the types covered by groups H05H9/-H05H13/102
14Vacuum chambers
18Cavities; Resonators
CPC
H05H 7/18
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE
7Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
14Vacuum chambers
18Cavities; Resonators
H01J 37/32247
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
32211Means for coupling power to the plasma
32247Resonators
Applicants YANGTZE OPTICAL FIBRE AND CABLE COMPANY, LTD.
Inventors Zhenyu Li
Songtao Lu
Shanpei Liu
Shengya Long
Gaoqing Lei
Yongtao Liu
Agents Matthias Scholl, PC
Matthias Scholl
Title
(EN) Plasma resonant cavity
Abstract
(EN)

A plasma resonant cavity, including a cylindrical resonant cavity casing, cutoff waveguides, and a waveguide inlet circumferentially formed on the cylindrical resonant cavity casing. The cutoff waveguides are arranged at two ends of the cylindrical resonant cavity casing and employ a movable end cover structure. An intermediate through hole is formed on each cutoff waveguide with the movable end cover structure, and a raised round table is arranged on an inner end surface of the cutoff waveguide and configured with the resonant cavity.


Related patent documents