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1. US20110205512 - Active spectral control of optical source

Office United States of America
Application Number 12860288
Application Date 20.08.2010
Publication Number 20110205512
Publication Date 25.08.2011
Grant Number 08520186
Grant Date 27.08.2013
Publication Kind B2
IPC
G03B 27/68
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
27Photographic printing apparatus
32Projection printing apparatus, e.g. enlarger, copying camera
52Details
68Introducing or correcting distortion, e.g. in connection with oblique projection
G03B 27/42
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
27Photographic printing apparatus
32Projection printing apparatus, e.g. enlarger, copying camera
42for automatic sequential copying of the same original
Applicants Seong Nakgeuon
Cymer, LLC
Lalovic Ivan B.
Farrar Nigel R.
Rafac Robert J.
Bendik Joseph J.
Inventors Seong Nakgeuon
Lalovic Ivan B.
Farrar Nigel R.
Rafac Robert J.
Bendik Joseph J.
Agents DiBerardino McGovern IP Group LLC
Title
(EN) Active spectral control of optical source
Abstract
(EN)

A method of controlling a spectral property of a light beam includes directing a light beam to a lithography exposure apparatus configured to create a pattern on a wafer; receiving information representative of a spectral property of the light beam; receiving information representative of an optical imaging condition of the lithography exposure apparatus; estimating a characteristic value of the light beam based on the received spectral property information and the received optical imaging condition information; determining whether the estimated light beam characteristic value matches a target light beam characteristic value; and if it is determined that the estimated light beam characteristic value does not match the target light beam characteristic value, adjusting the spectral property of the light beam.