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1. (US20090035523) Surface-modified member, surface-treating process and apparatus therefor

Office : United States of America
Application Number: 11922921 Application Date: 15.06.2006
Publication Number: 20090035523 Publication Date: 05.02.2009
Grant Number: 08216663 Grant Date: 10.07.2012
Publication Kind : B2
Prior PCT appl.: Application Number:PCTJP2006312042 ; Publication Number: Click to see the data
IPC:
B32B 3/10
B44C 1/22
C23C 16/02
F22B 1/08
C23C 14/34
F22B 1/00
B PERFORMING OPERATIONS; TRANSPORTING
32
LAYERED PRODUCTS
B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
3
Layered products essentially comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products essentially having particular features of form
10
characterised by a discontinuous layer, i.e. apertured or formed of separate pieces of material
B PERFORMING OPERATIONS; TRANSPORTING
44
DECORATIVE ARTS
C
PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
1
Processes, not specifically provided for elsewhere, for producing decorative surface effects
22
Removing surface-material, e.g. by engraving, by etching
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
02
Pretreatment of the material to be coated
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
22
STEAM GENERATION
B
METHODS OF STEAM GENERATION; STEAM BOILERS
1
Methods of steam generation characterised by form of heating method
02
by exploitation of the heat content of hot heat carriers
08
the heat carrier being steam
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
22
STEAM GENERATION
B
METHODS OF STEAM GENERATION; STEAM BOILERS
1
Methods of steam generation characterised by form of heating method
Applicants: Canaan Precision Co., Ltd.
Inventors: Takayanagi Koichiro
Agents: Wenderoth, Lind & Ponack, L.L.P.
Priority Data: 2005-188584 28.06.2005 JP
Title: (EN) Surface-modified member, surface-treating process and apparatus therefor
Abstract: front page image
(EN)

A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided.

A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000° C., hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.


Also published as:
KR1020080023264EP1913996JP4553939CN101262938WO/2007/000901