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1. (US20090127477) Laser irradiation apparatus and laser irradiation method

Office : United States of America
Application Number: 11919748 Application Date: 26.04.2006
Publication Number: 20090127477 Publication Date: 21.05.2009
Grant Number: 08395084 Grant Date: 12.03.2013
Publication Kind : B2
Prior PCT appl.: Application Number:PCTJP2006309191 ; Publication Number: Click to see the data
IPC:
B23K 26/06
B23K 26/00
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
02
Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06
Shaping the laser beam, e.g. by masks or multi-focusing
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
Applicants: Tanaka Koichiro
Semiconductor Energy Laboratory Co., Ltd.
Inventors: Tanaka Koichiro
Agents: Robinson Eric J.
Robinson Intellectual Property Law Office, P.C.
Priority Data: 2005-133788 02.05.2005 JP
Title: (EN) Laser irradiation apparatus and laser irradiation method
Abstract: front page image
(EN)

A laser beam having homogeneous intensity distribution is delivered without causing interference stripes of a laser to appear on an irradiation surface. A laser beam emitted from a laser oscillator passes through a diffractive optical element so that the intensity distribution thereof is homogenized. The beam emitted from the diffractive optical element then passes through a slit so that low-intensity end portions in a major-axis direction of the beam are blocked. Subsequently, the beam passes through a projecting lens and a condensing lens, so that an image of the slit is projected onto the irradiation surface. The projecting lens is provided so that the slit and the irradiation surface are conjugated. Thus, the irradiation surface can be irradiated with the laser having homogeneous intensity while preventing the diffraction by the slit.


Also published as:
KR1020080003926WO/2006/118312