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1. US20090207404 - System and method for the inspection of micro and nanomechanical structures

Office United States of America
Application Number 11988737
Application Date 13.07.2006
Publication Number 20090207404
Publication Date 20.08.2009
Grant Number 07978344
Grant Date 12.07.2011
Publication Kind B2
IPC
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
14
for measuring distance or clearance between spaced objects or spaced apertures
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
10
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04
Fine scanning or positioning
06
Circuits or algorithms therefor
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
20
Monitoring the movement or position of the probe
02
by optical means
G01B 11/14
G01Q 10/06
G01Q 20/02
Applicants Consejo Superior de Investigaciones Cientificas
Inventors Tamayo De Miguel Francisco Javier
Mertens Johan
Calleja Gómez Montserrat
Agents Wenderoth, Lind & Ponack, LLP.
Priority Data 05380157 14.07.2005 EP
Title
(EN) System and method for the inspection of micro and nanomechanical structures
Abstract
(EN)

The system for surface inspection is arranged to detect relative displacement and/or vibration features of a plurality of points of a plurality of elements (51) forming part of a mechanical structure (5), such as a micro- or nanomechanical structure. A light beam is displaced along the mechanical structure along a first trajectory (A), so as to detect a plurality of subsequent reference positions (C) along said first trajectory (A), and the light beam is further displaced along the mechanical structure along a plurality of second trajectories (B), each of said second trajectories (B) being associated with one of said reference positions (C).

The invention further relates to a corresponding method and to a program for carrying out the method.

Also published as
EP6807855