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1. (US20080068724) Projection optical system and method for photolithography and exposure apparatus and method using same

Office : United States of America
Application Number: 11907908 Application Date: 18.10.2007
Publication Number: 20080068724 Publication Date: 20.03.2008
Grant Number: 7580197 Grant Date: 25.08.2009
Publication Kind : B2
Prior PCT appl.: Application Number:JP03010665 ; Publication Number: Click to see the data
IPC:
G02B 1/00
G02B 1/06
G02B 3/00
G02B 17/00
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1
Optical elements characterised by the material of which they are made; Optical coatings for optical elements
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1
Optical elements characterised by the material of which they are made; Optical coatings for optical elements
06
made of fluids in transparent cells
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
3
Simple or compound lenses
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
17
Systems with reflecting surfaces, with or without refracting elements
CPC:
G02B 17/0892
G02B 13/22
G02B 17/08
G02B 21/33
G03F 7/70225
G03F 7/70341
Applicants: Nikon Corporation
Inventors: Omura Yasuhiro
Ikezawa Hironori
Agents: Oliff &; Berridge, PLC
Priority Data: 0311470 19.05.2003 GB
2002242925 23.08.2002 JP
Title: (EN) Projection optical system and method for photolithography and exposure apparatus and method using same
Abstract: front page image
(EN)

A liquid immersion optical system includes a first optically transparent member and a second optically transparent member, arranged in an optical path between the first optically transparent member and an object. A first space between the first optically transparent member and the second optically transparent member is fillable with a first liquid. A second space between the second optically transparent member and the object is fillable with a second liquid. The second optically transparent member is detachably arranged in the optical path between the first optically transparent member and the object.


Also published as:
KR1020050035890EP1532489JP2005536775US20050248856US20080068573US20080068576
US20080094696US20080049306US20080049336CN1668984AU2003256081WO/2004/019128