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1. US20080163096 - METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]

Claims

1. A user interface comprising:
a display of a three-dimensional simulation of a semiconductor workpiece handling system that includes a hardware item; and
a link to information related to the hardware item, wherein the link is substantially contained within an area of the display where the hardware item resides, and wherein the information includes at least a status of the hardware item and technical information for the hardware item.