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1. US20060098266 - Dielectric spacer for enhanced squeeze-film damping of movable members of MEMS devices

Office
United States of America
Application Number 11264959
Application Date 01.11.2005
Publication Number 20060098266
Publication Date 11.05.2006
Grant Number 7310180
Grant Date 18.12.2007
Publication Kind B2
IPC
G02B 26/00
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating or modulating
CPC
G02B 26/0808
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
0808by means of one or more diffracting elements
Applicants Silicon Light Machines Corporation
Inventors Payne Alexander P.
Leung Omar S.
Agents Okamoto &; Benedicto LLP
Priority Data 60625499 05.11.2004 US
Title
(EN) Dielectric spacer for enhanced squeeze-film damping of movable members of MEMS devices
Abstract
(EN)

In one embodiment, a capacitive micro electro-mechanical systems (MEMS) device includes a dielectric spacer between a bottom electrode and a movable member. The movable member may serve as a top electrode. A gap separates the top electrode from the dielectric spacer. The movable member may be actuated to deflect towards the bottom electrode by electrostatic force. The dielectric spacer reduces the height of the gap that would otherwise be formed between a top surface of the bottom electrode and a bottom surface of the movable member, thereby improving squeeze-film damping. The movable member may be a ribbon of a ribbon-type diffractive spatial light modulator, for example.


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