Processing

Please wait...

Settings

Settings

Goto Application

1. US20050047645 - Method for interaction with status and control apparatus

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]

Claims

1. An Advanced Process Control (APC) System, for managing a semiconductor processing system, comprising Graphical User Interface (GUI) screens, the GUI screens comprising:
web-based logon GUI screen for providing a secure entry point;
a plurality of GUI status screens for viewing current status of the semiconductor processing system, wherein at least one GUI status screen is accessible from the logon screen;
a plurality of GUI configuration screens for configuring the semiconductor processing system; and
a plurality of data manager GUI screens for managing historical and real-time data for the semiconductor processing system.
2. The APC System as claimed in claim 1, wherein the web-based logon screen provides a secure entry point for a first level user, a second level user, and a third level user, wherein the first level user is restricted to viewing status screens.
3. The APC system as claimed in claim 1, wherein the plurality of GUI status screens comprise a tool status screen, wherein the tool status screen further comprises information for at least one process module.
4. The APC System as claimed in claim 3, wherein the tool status screen further comprises means for allowing a user to select a graphical representation of a process module to display a process module status screen.
5. The APC System as claimed in claim 1, wherein the plurality of GUI status screens comprises at least one processing module status screen comprising at least one of: a lot name field for identifying the name of the lot to which the wafer in a process module belongs; a slot ID field identifying the ID of the slot to which the wafer in a process module belongs; a wafer ID field for identifying the wafer; a recipe ID field for identifying the recipe for a current wafer; a cassette ID field for identifying the cassette from which the wafer came, a wafer start time field, and a wafer end time field.
6. The APC System as claimed in claim 1, wherein the plurality of GUI status screens comprises a chart selection screen for accessing at least one of a tool related chart, a module related chart, a recipe related chart, a step related chart, a parameter related chart, a statistic related chart, and an autoSPC chart.
7. The APC System as claimed in claim 1, wherein the plurality of GUI status screens comprises an alarm log viewer screen for viewing status of at least one of a tool alarm, a processing alarm, a software alarm.
8. The APC System as claimed in claim 1, wherein the plurality of GUI status screens comprises a chart selection screen for accessing at least one of a trace chart, a summary chart, and a SPC chart.
9. The APC System as claimed in claim 1, wherein the plurality of GUI status screens comprises means for viewing sensor status.
10. The APC System as claimed in claim 1, wherein the plurality of GUI configuration screens comprises at least one of: a system configuration screen, a module configuration screen, a sensor configuration screen, and an alarm configuration screen.
11. The APC system as claimed in claim 10, wherein the plurality of GUI configuration screens further comprises a tool instance configuration screen.
12. The APC system as claimed in claim 10, wherein the plurality of GUI configuration screens further comprises a module instance configuration screen.
13. The APC system as claimed in claim 10, wherein the plurality of GUI configuration screens further comprises a sensor instance configuration screen.
14. The APC System as claimed in claim 1, wherein the plurality of GUI configuration screens comprises at least one of a trace chart configuration screen, a summary chart configuration screen, and a SPC chart configuration screen.
15. The APC System as claimed in claim 1, wherein the plurality of data manager GUI screens comprises at least one of: a screen for creating a data collection strategy, a screen for creating a data collection plan, a screen for creating an analysis strategy, and a screen for creating an analysis plan.
16. The APC System as claimed in claim 15, wherein the APC System automatically generates at least one of: the data collection strategy, the data collection plan, the analysis strategy, and the analysis plan
17. The APC System as claimed in claim 1, wherein the plurality of data manager GUI screens comprises at least one of: a screen for viewing status for a data collection strategy, a screen for viewing status for a data collection plan, a screen for viewing status for an analysis strategy, and a screen for viewing status for an analysis plan.
18. The APC System as claimed in claim 1, wherein the plurality of data manager GUI screens comprises at least one of: means for editing a data collection strategy, means for editing a data collection plan, means for editing an analysis strategy, and means for editing an analysis plan.
19. The APC System as claimed in claim 18, wherein the plurality of data manager GUI screens comprises the means for editing a data collection strategy, the means for editing a data collection strategy comprising at least one GUI panel for determining a usage context for the data collection strategy.
20. The APC System as claimed in claim 18, wherein the plurality of data manager GUI screens comprises the means for editing a data collection plan, the means for editing a data collection plan comprising at least one of: a GUI panel for editing sensor instances, a GUI panel for editing sensor parameters, a GUI panel for editing parameter saving information, and a GUI panel for editing a data collection type for a parameter.
21. The APC System as claimed in claim 18, wherein the plurality of data manager GUI screens comprises the means for editing an analysis strategy, the means for editing an analysis strategy comprising at least one GUI panel for determining a usage context for the analysis strategy.
22. The APC System as claimed in claim 18, wherein the plurality of data manager GUI screens comprises the means for editing an analysis plan, the means for editing an analysis plan comprising at least one of: a GUI panel for editing a SPC plan, a GUI panel for editing a PCA plan, a GUI panel for editing a PLS plan, and a GUI panel for editing a file output plan.
23. The APC System as claimed in claim 1, wherein a GUI screen comprises at least one of: a title panel, a control panel, and information panel,
24. The APC System as claimed in claim 23, wherein the GUI screen comprises a title panel comprising company logo block to display version information, user ID block to display the ID of the current user, alarm message block to display a message, current date and time block to display the current date and time of the server, current screen name block to display the name of the current screen, communication status block to display the current status for communications link between server and tool, tool ID block to display the ID of the tool being monitored, logoff block to allow a user to log off, and screen select block to view a list of all available screens.
25. The APC System as claimed in claim 23, wherein the GUI screen comprises a control-panel comprising a plurality of selection items enabling a user to display screens including a tool status screen, process module screen, charts screen, alarm log screen, SPC screen, data manager screen, and help screen.
26. The APC System as claimed in claim 1, wherein at least one GUI screen comprises a navigation tree selection menu.
27. The APC System as claimed in claim 1, wherein at least one GUI screen comprises a user-expandable navigation tree for displaying selectable items.
28. The APC System as claimed in claim 27, wherein the user-expandable navigation tree comprises at least one of: processing tool information, processing module information, strategy information, and plan information.
29. The APC System as claimed in claim 28, wherein the user-expandable navigation tree comprises the processing tool information, the processing tool information comprising information about at least one of an etching tool, a deposition tool, a cleaning tool, and a transfer tool.
30. The APC System as claimed in claim 28, wherein the user-expandable navigation tree comprises the strategy information, the strategy information comprising at least one of a control strategy and an analysis strategy.
31. The APC System as claimed in claim 28, wherein the user-expandable navigation tree comprises the plan information, the plan information comprising at least one of a data collection plan and an analysis plan,
32. The APC System as claimed in claim 1, wherein the plurality of GUI screens comprises at least one screen selected from a group consisting of an English language screen, a Japanese language screen, a Taiwanese language screen, a Chinese language screen, a Korean language screen, a German language screen, and a French language screen.
33. The APC System as claimed in claim 1, wherein at least one GUI screen comprises a multi-level navigation tree selected from a group consisting of an English language multi-level navigation tree, a Japanese language multi-level navigation tree, a Taiwanese language multi-level navigation tree, a Chinese language multi-level navigation tree, a Korean language multi-level navigation tree, a German language multi-level navigation tree, and a French language multi-level navigation tree.
34. A method for managing a semiconductor processing system using an Advanced Process Control (APC) System comprising Graphical User Interface (GUI) screens, the method comprising:
providing a secure entry point using a web-based logon screen;
providing a plurality of GUI status screens for viewing current status of the semiconductor processing system, wherein at least one GUI status screen is accessible from the logon screen;
providing a plurality of GUI configuration screens for configuring the semiconductor processing system; and
providing a plurality of data manager GUI screens for managing historical and real-time data for the semiconductor processing system.
35. The method as claimed in claim 34, wherein the method further comprises providing a GUI screen for viewing at least one of: tool status, module status, and sensor status.
36. The method as claimed in claim 34, wherein the method further comprises providing a GUI screen for configuring at least one of: a tool, a processing module, and a sensor.
37. The method as claimed in claim 34, wherein the method further comprises providing at least one of: a screen for creating a data collection strategy, a screen for creating a data collection plan, a screen for creating an analysis strategy, and a screen for creating an analysis plan.
38. The method as claimed in claim 34, wherein the method further comprises providing at least one of: a screen for viewing status for a data collection strategy, a screen for viewing status for a data collection plan, a screen for viewing status for an analysis strategy, and a screen for viewing status for an analysis plan.
39. The method as claimed in claim 34, wherein the method further comprises providing at least one of: means for editing a data collection strategy, means for editing a data collection plan, means for editing an analysis strategy, and means for editing an analysis plan.
40. The method as claimed in claim 34, wherein the method further comprises providing at least one screen selected from a group consisting of an English language screen, a Japanese language screen, a Taiwanese language screen, a Chinese language screen, a Korean language screen, a German language screen, and a French language screen.