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1. US6838650 - Confocal imaging

Office United States of America
Application Number 10130511
Application Date 16.05.2002
Publication Number 6838650
Publication Date 04.01.2005
Grant Number 6838650
Grant Date 04.01.2005
Publication Kind B1
IPC
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
64
Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21
Microscopes
G02B 27/64
G02B 21/00
CPC
G02B 21/004
G02B 21/0024
G02B 21/008
Applicants Agilent Technologies, Inc.
Inventors Toh Peng Seng
Priority Data 9905676-4 16.11.1999 SG
Title
(EN) Confocal imaging
Abstract
(EN)

A confocal imaging system for imaging a surface. The system includes an area array sensor having rows of sensors for detecting light reflected from the surface, and an optical system arranged to focus light from different focal planes on the surface to different sensor rows of the area array sensor.

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