Processing

Please wait...

Settings

Settings

Goto Application

1. US20210180951 - SYSTEM AND METHOD FOR MICRO-SCALE MACHINING

Office
United States of America
Application Number 17118919
Application Date 11.12.2020
Publication Number 20210180951
Publication Date 17.06.2021
Publication Kind A1
IPC
G01C 19/5691
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
567using the phase shift of a vibration node or antinode
5691of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
G01C 25/00
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
25Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
G01C 19/5776
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5776Signal processing not specific to any of the devices covered by groups G01C19/5607-G01C19/5719123
CPC
G01C 19/5776
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5776Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
G01C 19/5691
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
567using the phase shift of a vibration node or antinode
5691of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
G01C 25/00
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
25Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
Applicants ENERTIA MICROSYSTEMS INC.
Inventors Jae Yoong Cho
Title
(EN) SYSTEM AND METHOD FOR MICRO-SCALE MACHINING
Abstract
(EN)

A method of adjusting an operating parameter of a miniature electromechanical resonator comprises measuring angular coordinates of first and second principal stiffness axes of first and second wine-glass mode of the miniature electromechanical resonator, respectively; determining first and second wine-glass mode frequencies of the resonator being resonant frequencies of the first and second principal stiffness axes, respectively; calculating one or more locations on the resonator for machining to reduce a difference between the first and second wine-glass mode frequencies; and machining the one or more locations on the resonator to reduce the difference between the first and second wine-glass mode frequencies. An apparatus for adjusting an operating parameter of a miniature electromechanical resonator comprises a vibration actuator/detector configured to measure the locations of the first and second principal stiffness axes, and a micro-machining apparatus to add or remove material from the resonator for adjusting the operating parameter thereof.