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1. US20200310001 - NON-LINE-OF-SIGHT DEPOSITION OF COATING ON INTERNAL COMPONENTS OF ASSEMBLED DEVICE

Office United States of America
Application Number 16820338
Application Date 16.03.2020
Publication Number 20200310001
Publication Date 01.10.2020
Publication Kind A1
IPC
G02B 1/16
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made; Optical coatings for optical elements
10Optical coatings produced by application to, or surface treatment of, optical elements
16having an anti-static effect, e.g. electrically conducting coatings
G02B 1/14
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made; Optical coatings for optical elements
10Optical coatings produced by application to, or surface treatment of, optical elements
14Protective coatings, e.g. hard coatings
CPC
G02B 1/14
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made
10Optical coatings produced by application to, or surface treatment of, optical elements
14Protective coatings, e.g. hard coatings
G02B 1/16
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made
10Optical coatings produced by application to, or surface treatment of, optical elements
16having an anti-static effect, e.g. electrically conducting coatings
Applicants APPLIED MATERIALS, INC.
Inventors Alexander BERGER
Cheng-Hsuan CHOU
David KNAPP
Title
(EN) NON-LINE-OF-SIGHT DEPOSITION OF COATING ON INTERNAL COMPONENTS OF ASSEMBLED DEVICE
Abstract
(EN)

Described herein is a method of depositing a conformal, optically transparent coating onto a surface of one or more internal components that are enclosed within an assembled device using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting functionality of the assembled device. Also described is an assembled device including one or more internal components enclosed within the assembled device and a coating deposited onto a surface of the internal components enclosed within the assembled device, where the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-, chlorine-, sulfur-, hydrogen-, bromine-, or nitrogen-based acids and that does not negatively impact functionality of the internal components.

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