Application Number
16635068
Application Date
22.06.2018
Publication Number
20200246246
Publication Date
06.08.2020
Grant Number
11389389
Grant Date
19.07.2022
Publication Kind
B2
Applicants
SHIN-ETSU CHEMICAL CO., LTD.
Inventors
Masanao Kamei
Tomoya Kanai
Takuya Abe
Ryuichi Inaba
Tsuneo Kimura
Agents
Oliff PLC