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1. US20200173874 - METHOD FOR DETECTING ABNORMAL TERMINAL OF CARRIER

Office United States of America
Application Number 16463159
Application Date 13.03.2019
Publication Number 20200173874
Publication Date 04.06.2020
Publication Kind A1
IPC
G01L 5/00
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
5Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
G01M 13/00
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
13Testing of machine parts
CPC
G01M 13/00
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
13Testing of machine parts
G01L 5/0071
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
5Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
0061Force sensors associated with industrial machines or actuators
0071Specific indicating arrangements, e.g. of overload
Applicants WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
Inventors Mingjun DONG
Priority Data 201811430781.2 28.11.2018 CN
Title
(EN) METHOD FOR DETECTING ABNORMAL TERMINAL OF CARRIER
Abstract
(EN)

A method for detecting an abnormal terminal of a carrier having annular areas with terminals for carrying a substrate, including placing the substrate on the terminals of the carrier; when the terminals carry the substrate, measuring force values taken by the terminals; and comparing the force values taken by the terminals in a same annular area to detect the abnormal terminal corresponding to each of the annular areas.

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