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1. (US20190041183) CYLINDRICAL TARGET PRODUCTION METHOD AND CYLINDRICAL TARGET

Office : United States of America
Application Number: 16075037 Application Date: 02.02.2017
Publication Number: 20190041183 Publication Date: 07.02.2019
Publication Kind : A1
Prior PCT appl.: Application Number:PCTJP2017003710 ; Publication Number: Click to see the data
IPC:
G01B 5/28
C23C 14/34
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
5
Measuring arrangements characterised by the use of mechanical means
28
for measuring roughness or irregularity of surfaces
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
CPC:
C23C 14/3407
G01B 5/28
Applicants: SUMITOMO CHEMICAL COMPANY, LIMITED
Inventors: Mizuki SHIRAISHI
Takuto SUGAWARA
Koji NISHIOKA
Masahiro FUJITA
Priority Data: 2016-021212 05.02.2016 JP
Title: (EN) CYLINDRICAL TARGET PRODUCTION METHOD AND CYLINDRICAL TARGET
Abstract: front page image
(EN)

To provide a process for producing a cylindrical target which has almost no distortion in the longitudinal direction. The process for producing a cylindrical target according to the present invention comprises the steps of: processing a target material into a cylindrical shape; providing an adapter for attachment to a sputtering apparatus, in the target material processed into the cylindrical shape; and measuring a straightness in a longitudinal direction of an appearance of the target material having the adapter to confirm whether the straightness of the target material having the adapter is within a predetermined range.


Also published as:
KR1020180103173CN108603282KR1020190042103WO/2017/135349