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1. (US20180282860) HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE DURING SUBSTRATE PROCESSING IN A VACUUM PROCESSING CHAMBER, CARRIER FOR SUPPORTING A SUBSTRATE IN A VACUUM PROCESSING CHAMBER, AND METHOD FOR HOLDING A SUBSTRATE

Office : United States of America
Application Number: 15766341 Application Date: 07.12.2015
Publication Number: 20180282860 Publication Date: 04.10.2018
Publication Kind : A1
Prior PCT appl.: Application Number:PCTEP2015078887 ; Publication Number: Click to see the data
IPC:
C23C 14/50
C23C 14/00
B65G 15/58
B65G 15/42
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
50
Substrate holders
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15
Conveyers having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
30
Belts or like endless load-carriers
58
with means for holding or retaining the loads in fixed position, e.g. magnetic
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15
Conveyers having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
30
Belts or like endless load-carriers
32
made of rubber or plastics
42
having ribs, ridges, or other surface projections
CPC:
B65G 15/42
B65G 15/58
C23C 14/0036
C23C 14/50
Applicants: Simon LAU
Applied Materials, Inc.
Inventors: Simon LAU
Priority Data:
Title: (EN) HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE DURING SUBSTRATE PROCESSING IN A VACUUM PROCESSING CHAMBER, CARRIER FOR SUPPORTING A SUBSTRATE IN A VACUUM PROCESSING CHAMBER, AND METHOD FOR HOLDING A SUBSTRATE
Abstract: front page image
(EN)

The present disclosure provides a holding arrangement for holding a substrate during substrate processing in a vacuum processing chamber. The holding arrangement includes a flexible device having one or more sections, wherein the one or more sections are provided in a first operation condition to have a first portion, a second portion and a curved portion, wherein the curved portion is provided between the first portion and the second portion, wherein the first portion has a surface configured to face the substrate, and wherein the first portion and the second portion are moveable with respect to each other, and an adhesive is provided on the surface of the first portion.


Also published as:
CN108350570KR1020180091077WO/2017/097336