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1. (US20160223456) Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection

Office : United States of America
Application Number: 14917574 Application Date: 09.09.2013
Publication Number: 20160223456 Publication Date: 04.08.2016
Grant Number: 09846115 Grant Date: 19.12.2017
Publication Kind : B2
Prior PCT appl.: Application Number:PCTIB2013058407 ; Publication Number: Click to see the data
IPC:
B01L 3/00
G01N 21/17
G01N 11/16
G01N 29/02
G01N 5/00
G01N 29/24
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
L
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3
Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
11
Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
10
by moving a body within the material
16
by measuring damping effect upon oscillatory body
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29
Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
02
Analysing fluids
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
5
Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29
Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22
Details
24
Probes
CPC:
G01N 21/1702
B01L 3/502715
B01L 3/50273
B01L 3/502761
B01L 2300/06
B01L 2300/0654
B01L 2300/16
B01L 2300/18
G01N 5/00
G01N 11/16
G01N 29/022
G01N 29/2418
G01N 2201/06113
G01N 2201/062
G01N 2201/068
G01N 2201/08
G01N 2291/012
G01N 2291/0256
G01N 2291/02818
G01N 2291/0427
Applicants: KOC UNIVERSITESI
Inventors: Hakan Urey
Goksenin Yaralioglu
Agents: Gokalp Bayramoglu
Priority Data:
Title: (EN) Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection
Abstract: front page image
(EN)

The present invention relates generally to the field of chemical and biological sensors and in particular to micro electro-mechanical systems (MEMS) sensors for measuring fluid viscosity and detection of minute amounts of chemicals and biological agents in fluids. It is an object of the present invention to provide a sensor that will work in disposable cartridges with remote sensing that can measure dynamic changes of the functionalized cantilevers in liquid and gas environment.


Also published as:
CN105659079EP3044577JP6330046WO/2015/033190