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1. (SG172276) SLURRY COMPOSITION CONTAINING NON-IONIC POLYMER AND METHOD FOR USE

Office : Singapore
Application Number: 2011045077 Application Date: 17.12.2009
Publication Number: 172276 Publication Date: 28.07.2011
Publication Kind : A
Prior PCT appl.: Application Number:PCTUS2009068466 ; Publication Number:2010080495 Click to see the data
Applicants: CABOT MICROELECTRONICS CORPORATION
Inventors: GRUMBINE, STEVEN
NAM, CHUL-WOO
WARD, WILLIAM
NAGARAJAN, RAMASUBRAMANYAM
Priority Data: 12317254 19.12.2008 US
Title: (EN) SLURRY COMPOSITION CONTAINING NON-IONIC POLYMER AND METHOD FOR USE
Abstract:
(EN) A wiresaw cutting fluid composition of the present invention comprises 25 to 75 % by weight of a particulate abrasive suspended in an aqueous carrier containing a polymeric viscosity modifier that comprises a polymer including a majority of non-ionic monomer units (preferably 100 mol % non-ionic monomer units), has a number average molecular weight (Mn) of at least 5 kDa, and is present in the composition at a concentration sufficient to provide a Brookfield viscosity for the composition in the range of 50 to 1000 cP, e.g., 50 to 700 cP, at 25 °C at a spindle rotation rate of 60 rpm. In one embodiment, the viscosity modifier comprises a polymer having a weight average molecular weight (Mw) of at least 200 kDa. When a viscosity modifier of 200 kDa or greater Mw is utilized, a preferred wiresaw cutting method the cutting fluid is circulated and applied by pumps and nozzles operating at a relatively low shear rate of not more than 104 s-1.
Also published as:
IL213230EP2376587JP2012512951CN102257092KR1020110099744MYPI 2011002875
WO/2010/080495