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1. (SG163534) OPTIMIZING USE AND PERFORMANCE OF OPTICAL SYSTEMS IMPLEMENTED WITH TELECENTRIC ON-AXIS DARK FIELD ILLUMINATION

Office : Singapore
Application Number: 2010046654 Application Date: 07.07.2006
Publication Number: 163534 Publication Date: 30.08.2010
Publication Kind : A
CPC:
G01N 21/9501
G01N 21/47
G01N 2021/8822
G02B 13/22
Applicants: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventors: BALDWIN, LEO
EMERY, JOSEPH, J.
Priority Data: 60/697,904 08.07.2005 US
Title: (EN) OPTIMIZING USE AND PERFORMANCE OF OPTICAL SYSTEMS IMPLEMENTED WITH TELECENTRIC ON-AXIS DARK FIELD ILLUMINATION
Abstract:
Also published as:
KR1020080033230JP2009500631CN101218500CN101887032KR1020120127522WO/2007/008742