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1. (KR1020060128877) EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD

Office : Republic of Korea
Application Number: 1020067010221 Application Date: 25.05.2006
Publication Number: 1020060128877 Publication Date: 14.12.2006
Publication Kind : A
IPC:
H01L 21/027
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
CPC:
G03F 7/70341
G03F 7/2041
G03F 7/70808
Applicants: NIKON CORPORATION
가부시키가이샤 니콘
Inventors: IMAI MOTOKATSU
이마이 모토가츠
MAKINOUCHI SUSUMU
마기노우치 스스무
Agents: 김태홍
송승필
Priority Data: JP-P-2003-00366914 28.10.2003 JP
Title: (EN) EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD
(KO) 노광 장치, 노광 방법, 및 디바이스의 제조 방법
Abstract: front page image
(EN)

An exposure apparatus forming a liquid immersion region by supplying a liquid on portion on a substrate and forming a predetermined pattern on the substrate through the liquid. The apparatus is characterized in that a preliminary liquid immersion region that is capable of holding on the substrate a portion of the liquid is formed on the outer periphery of the liquid immersion region. The liquid placed between the lower face of a projection optical system and the surface of the substrate is prevented from being separated from the lower face of the projection optical system as the projection optical system and the substrate relatively move.

© KIPO & WIPO 2007


(KO) 기판 상의 일부에 액체를 공급하여 액침 영역을 형성하고, 상기 액체를 통해 상기 기판 상에 소정의 패턴을 형성하는 노광 장치에 있어서, 상기 액침 영역의 외주에 상기 기판 상에 액체의 일부를 유지 가능한 예비 액침 영역이 형성되는 것을 특징으로 한다. 투영 광학계의 하면과 기판 표면 사이에 배치되는 액체가 투영 광학계와 기판의 상대 이동에 따라 투영 광학계의 하면으로부터 박리되는 것을 방지할 수 있다.
Also published as:
EP1679738JP4605014WO/2005/041276