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1. KR1020080023264 - SURFACE MODIFIED MEMBER, SURFACE TREATING METHOD AND SURFACE TREATING SYSTEM

Office Republic of Korea
Application Number 1020087002103
Application Date 25.01.2008
Publication Number 1020080023264
Publication Date 12.03.2008
Publication Kind A
IPC
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
J
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19
Chemical, physical, or physico-chemical processes in general; Their relevant apparatus
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
23
Other surface treatment of glass not in the form of fibres or filaments
C CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
41
After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
80
of only ceramics
91
involving the removal of part of the materials of the treated articles, e.g. etching
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
8
Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
06
using gases
08
only one element being applied
10
Oxidising
16
using oxygen-containing compounds, e.g. H2O, CO2
B01J 19/00
C03C 23/00
C04B 41/91
C23C 8/16
CPC
C23C 8/16
C03C 15/00
C03C 17/001
C03C 23/0075
C03C2217/75
C03C2218/15
Applicants ASAHI TECH CO., LTD.
Inventors TAKAYANAGI KOICHIRO
Priority Data 2005 2005188584 28.06.2005 JP
Title
(EN) SURFACE MODIFIED MEMBER, SURFACE TREATING METHOD AND SURFACE TREATING SYSTEM
Abstract
(EN)
A member exhibiting high antistatic properties and hydrophilicity which is capable of preventing adhesion of contaminants, and a method and system for surface treatment. The surface treatment system comprises a steam generation unit (1), an overheating unit (5) for overheating steam to generate overheated steam, and a processing unit (11) for spraying or bringing the overheated steam to a member to be treated (ceramics, metals) (14). The member to be treated can be imparted with hydrophilicity and antistatic properties when it is treated with overheated steam of 300-1000°C. The member to be treated may be a member (window member) in contact with the processing space in a vapor phase surface treatment system (such as a chamber) for surface treating a substrate by vapor phase method such as PVD, CVD, and dry etching. ©KIPO&WIPO 2008