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1. (KR1020080003926) LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD

Office : Republic of Korea
Application Number: 1020077027356 Application Date: 23.11.2007
Publication Number: 1020080003926 Publication Date: 08.01.2008
Publication Kind : A
IPC:
H01S 3/10
H01L 21/027
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
10
Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
CPC:
B23K 26/0738
H01L 21/268
H01L 27/1214
H01L 27/1266
H01L 21/0237
H01L 21/0268
Applicants: SEMICONDUCTOR ENERGY LABORATORY K.K.
가부시키가이샤 한도오따이 에네루기 켄큐쇼
Inventors: TANAKA KOICHIRO
타나카 코이치로
Agents: 황의만
Priority Data: JP-P-2005-00133788 02.05.2005 JP
Title: (EN) LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD
(KO) 레이저 조사 장치 및 레이저 조사 방법
Abstract: front page image
(EN) A laser beam having homogeneous intensity distribution is delivered without causing interference stripes of a laser to appear on an irradiation surface. A laser beam emitted from a laser oscillator passes through a diffractive optical element so that the intensity distribution thereof is homogenized. The beam emitted from the diffractive optical element then passes through a slit so that low-intensity end portions in a major-axis direction of the beam are blocked. Subsequently, the beam passes through a projecting lens and a condensing lens, so that an image of the slit is projected onto the irradiation surface. The projecting lens is provided so that the slit and the irradiation surface are conjugated. Thus, the irradiation surface can be irradiated with the laser having homogeneous intensity while preventing the diffraction by the slit. ©KIPO&WIPO 2008
(KO) 균일한 강도 분포를 가지는 레이저빔을 조사면에 레이저의 간섭 줄무늬를 발생시키지 않고 조사한다. 레이저 발진기로부터 출사한 레이저빔은 회절 광학소자에 의해 그의 강도 분포가 균일하게 된다. 회절 광학소자를 통과한 빔을 슬릿에 통과시켜, 빔의 장축 방향의 강도가 약한 단부를 차단한다. 이어서, 빔을 투영 렌즈 및 집광 렌즈를 통과시켜, 슬릿의 상(像)을 조사면에 투영한다. 투영 렌즈는 슬릿과 조사면이 공역의 관계가 되도록 배치된다. 그리하여, 슬릿에 의한 회절을 방지하면서, 강도가 균일한 레이저를 조사면에 조사하는 것이 가능하게 된다.
Also published as:
US20090127477WO/2006/118312