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Machine translation
1. (KR1020110046057) COATING APPARATUS FOR PREVENTING THERMAL TRANSFORMATION OF A SUBSTRATE, A COATING METHOD THEREOF, AND A METHOD FOR MAKING AN ORGANIC FILM USING THE SAME
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Application Number: 1020090102879 Application Date: 28.10.2009
Publication Number: 1020110046057 Publication Date: 04.05.2011
Grant Number: 1011822260000 Grant Date: 12.09.2012
Publication Kind : B1 KOREAN PATENT ABSTRACTS
IPC:
B05D 3/02
B05D 7/04
B05C 5/02
B05D 1/26
CPC:
H01L 51/0026
H01L 21/67115
H01L 21/6715
H01L 51/0008
H01L 51/56
Applicants: SAMSUNG MOBILE DISPLAY CO., LTD.
삼성모바일디스플레이주식회사
Inventors: PARK, JIN HAN
박진한
NAM, MYENG WOO
남명우
SHIN, EUI SHIN
신의신
KIM, SUNG GON
김성곤
Agents: 팬코리아특허법인
Priority Data:
Title: (KO) 도포 장치, 이의 도포 방법 및 이를 이용한 유기막 형성 방법
(EN) COATING APPARATUS FOR PREVENTING THERMAL TRANSFORMATION OF A SUBSTRATE, A COATING METHOD THEREOF, AND A METHOD FOR MAKING AN ORGANIC FILM USING THE SAME
Abstract:
(KO) 본 발명은 기판에 도포 재료를 도포 후 건조 장치로 이송 중 발생하는 막 두께의 변동을 방지할 수 있는 도포 장치, 이의 도포 방법 및 이를 이용한 유기막 형성 방법에 관한 것이다.
(EN) PURPOSE: A coating apparatus is provided to prevent the deformation of film thickness generated in the transfer to a dryer, by drying coating materials in a coating device and to avoid the deformation and precision of a stage. CONSTITUTION: A coating apparatus(1) includes: a stage(20) in which a coating substrate(10) is installed; a coating part(30) which is installed on the stage and applies the coating materials to the coating material; and a heating source(40) which spaced from the stage and supplies the heat to the coating material. The heating source is positioned corresponding to whole region of the coating material and supplies uniform heat to whole regions. COPYRIGHT KIPO 2011